RF hollow cathode discharges with tapered shape

被引：8

作者：

Fukuda, T ^{[1
]}

Matsuoka, A ^{[1
]}

Kondoh, Y ^{[1
]}

Sugawara, M ^{[1
]}

机构：

[1] HACHINOHE INST TECHNOL,DEPT ELECT ENGN,HACHINOHE,AOMORI 031,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1996年 / 35卷 / 6A期

关键词：

RF plasmas; hollow cathode discharge; tapered shape; Ar plasma; negative glow;

D O I：

10.1143/JJAP.35.L729

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A hollow cathode with tapered shape (HCT) is developed in order to expand the range of operating pressures. Although the plasma density produced by the HCT becomes slightly lower than that by an ordinary hollow cathode, it is demonstrated experimentally that the range of operating pressures for stable RF hollow cathode discharge is expanded. It is shown that the position of the negative glow moves inside the HCT for different operating pressures to sustain the hollow cathode discharge.

引用

页码：L729 / L730

页数：2

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