Experimental Research on Electrochemical Micro-machining

The machining at microscopic scales is considered to be great importance in future technology. Electrochemical micro-machining (EMM) appears to be promising to machine the micro-structures because materials could be machined at ion by ion. Furthermore, EMM appears to offer several advantages including better precision, wide range of materials could be machined, no stress and recast on the machined workpiece. This paper is focused on developing a micro electrochemical machining system in which the micro components are fabricated. Influences of parameters like voltages, feeding speed, electrolyte on the accuracy of the workpiece are discussed in detail. Finally, micro-structures of micro-hole array and micro slut are fabricated.