Compact Thin-Film Packaged RF-MEMS Switched Capacitors

被引：0

作者：

Nadaud, Kevin ^{[1
]}

Roubeau, Fabien ^{[1
]}

Pothier, Arnaud ^{[1
]}

Blondy, Pierre ^{[1
]}

Zhang, Lin-Yang ^{[2
]}

Stefanini, Romain ^{[2
]}

机构：

[1] Univ Limoges, UMR CNRS 7252, XLIM, 123 Ave Albert Thomas, F-87060 Limoges, France

[2] AirMems, 1 Ave ESTER, F-87069 Limoges, France

来源：

2016 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS) | 2016年

关键词：

Microelectromechanical systems; Package; RF-MEMS; Switches;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design, the realization and the measurement of a thin-film packaged RF-MEMS switched capacitors. Packaging is included in microelectronics fabrication process, with Silicon Nitride thin film. The capacitors are actuated by deflecting thin gold metal membranes towards the package dielectric, increasing the capacitance by a factor 2.3. The device size, including its packaging, is 50 x 40 mu m(2). Pull-in and release voltages have less than 5V variation between 20 degrees C and 85 degrees C. The device has been tested with 20 dBm applied power and shows no sensitivity to incident power.

引用

页数：4

共 50 条

[11] THIN-FILM CHIP CAPACITORS BY RF SPUTTERING
DIRSTINE, RT
MCCANN, JA
FOSTER, B
AMERICAN CERAMIC SOCIETY BULLETIN, 1984, 63 (08): : 1008 - 1008
[12] High-Reliability RF-MEMS Switched Capacitors With Digital and Analog Tuning Characteristics
Grichener, Alex
Rebeiz, Gabriel M.
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2010, 58 (10) : 2692 - 2701
[13] Thin-film encapsulated RF MEMS switches
Leedy, Kevin D.
Strawser, Richard E.
Cortez, Rebecca
Ebel, John L.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (02) : 304 - 309
[14] Wafer-scale packaged RF-MEMS switches
Muldavin, J.
Bozler, C.
Keast, C.
2006 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-5, 2006, : 267 - +
[15] Miniature RF MEMS switched capacitors
Mercier, D
Van Caekenberghe, K
Rebeiz, GM
2005 IEEE MTT-S International Microwave Symposium, Vols 1-4, 2005, : 745 - 748
[16] CMOS-compatible RF-MEMS tunable capacitors
Oz, A
Fedder, GK
2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2003, : A97 - A100
[17] CMOS-compatible RF-MEMS tunable capacitors
Oz, A
Fedder, GK
2003 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM, DIGEST OF PAPERS, 2003, : 611 - 614
[18] Evaluation of platinum as a structural thin film material for RF-MEMS devices
Ekkels, P.
Rottenberg, X.
Puers, R.
Tilmans, H. A. C.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (06)
[19] THIN FILM PACKAGED REDUNDANCY RF MEMS SWITCHES FOR SPACE APPLICATIONS
Souchon, F.
Saint-Patrice, D.
Pornin, J. L.
Bouchu, D.
Baret, C.
Reig, B.
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 175 - 178
[20] RF-MEMS switched varactor for high power applications
Palego, C.
Pothier, A.
Gasseling, T.
Crunteanu, A.
Cibert, C.
Champeaux, C.
Tristant, P.
Catherinot, A.
Blondy, P.
2006 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-5, 2006, : 35 - +

← 1 2 3 4 5 →