Experimental characterization of focusing by high-numerical-aperture zone plates

被引：42

作者：

Menon, R ^{[1
]}

Gil, D ^{[1
]}

Smith, HI ^{[1
]}

机构：

[1] MIT, Elect Res Lab, Cambridge, MA 02139 USA

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2006年 / 23卷 / 03期

关键词：

D O I：

10.1364/JOSAA.23.000567

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The first method uses spot exposures in photoresist and the second uses a conventional knife-edge scan. The experimental results agree well with rigorous theoretical calculations. (C) 2006 Optical Society of America.

引用

页码：567 / 571

页数：5

共 9 条

[1] FINITE-LENGTH LINE-SPREAD FUNCTION [J].

DALLAS, WJ ;

BARRETT, HH ;

WAGNER, RE ;

ROEHRIG, H ;

WEST, CN .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1987, 4 (11) :2039-2044

[2] Fabrication of high-numerical-aperture phase zone plates with a single lithography exposure and no etching [J].

Gil, D ;

Menon, R ;

Smith, HI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06) :2956-2960

[3] Lithographic patterning and confocal imaging with zone plates [J].

Gil, D ;

Menon, R ;

Carter, DJD ;

Smith, HI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06) :2881-2885

[4] Sharper images by focusing soft X-rays with photon sieves [J].

Kipp, L ;

Skibowski, M ;

Johnson, RL ;

Berndt, R ;

Adelung, R ;

Harm, S ;

Seemann, R .

NATURE, 2001, 414 (6860) :184-188

[5] Photon-sieve lithography [J].

Menon, R ;

Gil, D ;

Barbastathis, G ;

Smith, HI .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2005, 22 (02) :342-345

[6] Maskless lithography [J].

Menon, Rajesh ;

Patel, Amil ;

Gil, Dario ;

Smith, Henry I. .

MATERIALS TODAY, 2005, 8 (02) :26-33

[7] Formulation and application of the finite-difference time-domain method for the analysis of axially symmetric diffractive optical elements [J].

Prather, DW ;

Shi, SY .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1999, 16 (05) :1131-1142

[8] Theoretical analysis of confocal microscopy with microlenses [J].

Tiziani, HJ ;

Achi, R ;

Kramer, RN ;

Wiegers, L .

APPLIED OPTICS, 1996, 35 (01) :120-125

[9]

Wilson T., 1984, THEORY PRACTICE SCAN

← 1 →