Optical Fiber Fabry-Perot Humidity Sensor Based on Porous Al2O3 Film

被引:55
作者
Huang, Chujia [1 ]
Xie, Weijing [1 ]
Yang, Minghong [1 ]
Dai, Jixiang [1 ]
Zhang, Bo [2 ]
机构
[1] Wuhan Univ Technol, Natl Engn Lab Fiber Opt Sensing Technol, Wuhan 430070, Peoples R China
[2] Wuhan Univ Technol, Coll Sci, Wuhan 430070, Peoples R China
基金
美国国家科学基金会;
关键词
Fabry-Perot interferometer; optical fiber sensors; relative-humidity; porous anodic alumina film;
D O I
10.1109/LPT.2015.2454271
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An optical fiber humidity sensor with porous anodic alumina (PAA) film on single-mode fiber tip is proposed and experimentally demonstrated. Relative-humidity (RH) sensing is correlated with the shift of interference fringe due to capillary condensation, which results in the change of effective refractive index of PAA film when exposed to different RH environments. Experimental result shows that sensitivity of 0.31 nm/% RH can be realized with very good repeatability in range of 20% RH-90% RH. It can be concluded that fiber-optic RH sensors with PAA film of thinner thickness, smaller aperture size, and aspect ratio would present promising sensing performance.
引用
收藏
页码:2127 / 2130
页数:4
相关论文
共 15 条
[1]   A humidity sensor based on a hetero-core optical fiber [J].
Akita, Shohei ;
Sasaki, Hiroyuki ;
Watanabe, Kazuhiro ;
Seiki, Atsushi .
SENSORS AND ACTUATORS B-CHEMICAL, 2010, 147 (02) :385-391
[2]   Design and performance evaluation of polyvinyl alcohol/polyimide coated optical fibre grating-based humidity sensors [J].
Alwis, L. ;
Sun, T. ;
Grattan, K. T. V. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (02)
[3]   Effect of moisture content and water mobility on microwave expansion of imitation cheese [J].
Arimi, J. M. ;
Duggan, E. ;
O'Sullivan, M. ;
Lyng, J. G. ;
O'Riordan, E. D. .
FOOD CHEMISTRY, 2010, 121 (02) :509-516
[4]   Sensitivity evolution and enhancement mechanism of porous anodic aluminum oxide humidity sensor using magnetic field [J].
Chen, S. W. ;
Khor, O. K. ;
Liao, M. W. ;
Chung, C. K. .
SENSORS AND ACTUATORS B-CHEMICAL, 2014, 199 :384-388
[5]   Humidity sensors: A review of materials and mechanisms [J].
Chen, Z ;
Lu, C .
SENSOR LETTERS, 2005, 3 (04) :274-295
[6]   Microstructured optical fiber interferometric breathing sensor [J].
Favero, Fernando C. ;
Villatoro, Joel ;
Pruneri, Valerio .
JOURNAL OF BIOMEDICAL OPTICS, 2012, 17 (03)
[7]   Humidity effects in the response of a porous pressure-sensitive paint [J].
Kameda, Masaharu ;
Yoshida, Masahide ;
Sekiya, Tsubasa ;
Nakakita, Kazuyuki .
SENSORS AND ACTUATORS B-CHEMICAL, 2015, 208 :399-405
[8]   Capacitive humidity sensor design based on anodic aluminum oxide [J].
Kim, Youngdeuk ;
Jung, Bongbu ;
Lee, Hunkee ;
Kim, Hyejin ;
Lee, Kunhong ;
Park, Hyunchul .
SENSORS AND ACTUATORS B-CHEMICAL, 2009, 141 (02) :441-446
[9]   Investigation on highly ordered porous anodic alumina membranes formed by high electric field anodization [J].
Li, Dongdong ;
Jiang, Chuanhai ;
Jiang, Jianhua ;
Ren, Xin .
MATERIALS CHEMISTRY AND PHYSICS, 2008, 111 (01) :168-171
[10]   ORDERED METAL NANOHOLE ARRAYS MADE BY A 2-STEP REPLICATION OF HONEYCOMB STRUCTURES OF ANODIC ALUMINA [J].
MASUDA, H ;
FUKUDA, K .
SCIENCE, 1995, 268 (5216) :1466-1468