Imaging deep UV light with diamond-based systems

被引:22
作者
Lansley, SP
Gaudin, O
Ye, HT
Rizvi, N
Whitfield, MD
McKeag, RD
Jackman, RB
机构
[1] UCL, London WC1E 7JE, England
[2] Exitech Ltd, Oxford OX8 8LH, England
[3] Centron Ltd, Croydon CR9 OBG, England
基金
英国工程与自然科学研究理事会;
关键词
photodetectors; UV imaging; photoconductivity;
D O I
10.1016/S0925-9635(02)00010-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond grown by chemical vapour deposition (CVD) techniques has shown great promise for the fabrication of high sensitivity, low dark current, fast and visible-blind deep UV photodetectors. In addition to the careful choice of substrate material, defect passivation treatments applied to the diamond after growth have been found to considerably enhance the detector characteristics achieved. In this paper, we report on the first purposefully designed one-dimensional CVD diamond imaging array for the detection of nanosecond 193-nm excimer laser pulses using this approach. It is shown to perform extremely well, giving less than 2% pixel-to-pixel variation in signal response, and is fast enough to avoid any sign of charge build-up during prolonged operation. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:433 / 436
页数:4
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