Simulation of out-of-plane displacement measurement using vortex beam: on the base of liquid crystal spatial light modulator

被引:0
作者
Sun, Haibin [1 ,2 ]
Sun, Ping [1 ]
机构
[1] Shandong Normal Univ, Shandong Prov Key Lab Opt & Photon Device, Jinan 250014, Shandong, Peoples R China
[2] Taishan Univ, Coll Phys & Elect Engn, Tai An 271000, Shandong, Peoples R China
来源
OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IV | 2016年 / 10023卷
关键词
Vortex beam; out-of-plane displacement measurement; liquid crystal spatial light modulator; SPECKLE PATTERN INTERFEROMETRY; PHASE SINGULARITIES; OPTICAL VORTICES; METROLOGY; TRANSFORM;
D O I
10.1117/12.2243954
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In ESPI experiment, object beam and reference beam are always planar light. The plane light can be replaced by vortex beam. Vortex beams can be generated by a reflective liquid crystal spatial light modulator (LC-SLM) which added in the optical path. The generated vortex beam can be used as object light or reference light in out-of-plane displacement measurement. The out-of-plane displacement is simulated and analyzed before and after the object deformation. By phase shifting method and unwrapping, the distribution of phase difference is obtained. The simulation results demonstrate the efficacy of the proposed method for the out-of-plane displacement measurements.
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页数:6
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