A Tip-Tilt-Piston Micromirror With Symmetrical Lateral-Shift-Free Piezoelectric Actuators

被引：23

作者：

Liao, Wenjun ^{[1
]}

Liu, Wenjing ^{[2
]}

Zhu, Yiping ^{[1
]}

Tang, Yongming ^{[2
]}

Wang, Baoping ^{[2
]}

Xie, Huikai ^{[1
]}

机构：

[1] Univ Florida, Dept Elect Engn, Gainesville, FL 32611 USA

[2] Southeast Univ, Dept Elect Engn, Nanjing 210000, Jiangsu, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2013年 / 13卷 / 08期

关键词：

Micromirror; tip-tilt-piston micromirror; lead zirconate titanate (PZT); piezoelectric actuators; DEVICE DESIGN; MIRROR;

D O I：

10.1109/JSEN.2013.2264932

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the design, fabrication, and characterization of a high-fill-factor tip-tilt-piston micromirror actuated by four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The micromirror can operate in both piston and rotation modes. At the piston mode, the measured resonant frequency is 990 Hz. An 18.3-mu m piston displacement is obtained by applying 5 V-dc to four symmetrical LSF (SLSF) actuators. For the rotation mode, the measured resonant frequency is 1650 Hz and an optical deflection angle of 4.2 degrees is measured by applying 5 V-dc to one SLSF actuator. A 2-D resonant scanning pattern is achieved when the PZT micromirror is applied with a 3 V-pp sinusoidal voltage at the resonance frequency.

引用

页码：2873 / 2881

页数：9

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