Direct measurement of surface stress during Bi-mediated Ge growth on Si

被引:1
|
作者
Asaoka, Hidehito [1 ]
Yamazaki, Tatsuya [1 ]
Yamaguchi, Kenji [1 ]
Shamoto, Shin-ichi [1 ]
Filimonov, Sergey [2 ]
Suemitsu, Maki [3 ]
机构
[1] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
[2] Tomsk State Univ, Dept Phys, Tomsk 634050, Russia
[3] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
Stresses; Surface structure; Molecular beam epitaxy; Surfactant-mediated epitaxy; SI(111); EPITAXY; FILMS;
D O I
10.1016/j.susc.2012.12.002
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have focused on stress measurements during Bi termination of Si (111) and Ge growth on this Bi-mediated Si (111). In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. We find the Bi-terminated Si (111) root 3x root 3-beta surface releases 1.8 N/m (=J/m(2)), or (1.4 eV/(1x1 unit cell)), of the surface energy from the strong tensile Si (111) 7x7 reconstruction. Subsequent Ge deposition on the Bi-terminated Si surface develops a compressive stress, which oscillates with a period corresponding to the growth of a single bilayer. The real-time stress measurement provides a direct evidence for this oscillatory stress relaxation in the layer-by-layer growth. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:157 / 160
页数:4
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