Direct measurement of surface stress during Bi-mediated Ge growth on Si
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作者:
Asaoka, Hidehito
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Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Asaoka, Hidehito
[1
]
Yamazaki, Tatsuya
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Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yamazaki, Tatsuya
[1
]
Yamaguchi, Kenji
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Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yamaguchi, Kenji
[1
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Shamoto, Shin-ichi
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Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Shamoto, Shin-ichi
[1
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Filimonov, Sergey
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Tomsk State Univ, Dept Phys, Tomsk 634050, RussiaJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Filimonov, Sergey
[2
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Suemitsu, Maki
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Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Suemitsu, Maki
[3
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机构:
[1] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
[2] Tomsk State Univ, Dept Phys, Tomsk 634050, Russia
[3] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
We have focused on stress measurements during Bi termination of Si (111) and Ge growth on this Bi-mediated Si (111). In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. We find the Bi-terminated Si (111) root 3x root 3-beta surface releases 1.8 N/m (=J/m(2)), or (1.4 eV/(1x1 unit cell)), of the surface energy from the strong tensile Si (111) 7x7 reconstruction. Subsequent Ge deposition on the Bi-terminated Si surface develops a compressive stress, which oscillates with a period corresponding to the growth of a single bilayer. The real-time stress measurement provides a direct evidence for this oscillatory stress relaxation in the layer-by-layer growth. (C) 2012 Elsevier B.V. All rights reserved.
机构:
Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Asaoka, Hidehito
Yamazaki, Tatsuya
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机构:
Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Eiko Engn Co Ltd, Hitachinaka, Ibaraki 3120024, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yamazaki, Tatsuya
Shamoto, Shin-ichi
论文数: 0引用数: 0
h-index: 0
机构:
Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
机构:
Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Japan Atom Energy Agcy, Adv Sci Res Ctr, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Asaoka, Hidehito
Yamazaki, Tatsuya
论文数: 0引用数: 0
h-index: 0
机构:
Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Eiko Engn Co Ltd, Hitachinaka, Ibaraki 3120024, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yamazaki, Tatsuya
Yokoyama, Yuta
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机构:
Japan Atom Energy Agcy, Adv Sci Res Ctr, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yokoyama, Yuta
Yamaguchi, Kenji
论文数: 0引用数: 0
h-index: 0
机构:
Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan