Direct measurement of surface stress during Bi-mediated Ge growth on Si

被引:1
|
作者
Asaoka, Hidehito [1 ]
Yamazaki, Tatsuya [1 ]
Yamaguchi, Kenji [1 ]
Shamoto, Shin-ichi [1 ]
Filimonov, Sergey [2 ]
Suemitsu, Maki [3 ]
机构
[1] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
[2] Tomsk State Univ, Dept Phys, Tomsk 634050, Russia
[3] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
Stresses; Surface structure; Molecular beam epitaxy; Surfactant-mediated epitaxy; SI(111); EPITAXY; FILMS;
D O I
10.1016/j.susc.2012.12.002
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have focused on stress measurements during Bi termination of Si (111) and Ge growth on this Bi-mediated Si (111). In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. We find the Bi-terminated Si (111) root 3x root 3-beta surface releases 1.8 N/m (=J/m(2)), or (1.4 eV/(1x1 unit cell)), of the surface energy from the strong tensile Si (111) 7x7 reconstruction. Subsequent Ge deposition on the Bi-terminated Si surface develops a compressive stress, which oscillates with a period corresponding to the growth of a single bilayer. The real-time stress measurement provides a direct evidence for this oscillatory stress relaxation in the layer-by-layer growth. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码:157 / 160
页数:4
相关论文
共 50 条
  • [1] Islands as catalyst for film relaxation in Bi-mediated Ge epitaxy on Si(111)
    Falta, J
    Schmidt, T
    Materlik, G
    Zeysing, J
    Falkenberg, G
    Johnson, RL
    APPLIED SURFACE SCIENCE, 2000, 162 : 256 - 262
  • [2] In situ REM observations of surfactant-mediated epitaxy: Growth of Ge on Si(111) surfaces mediated by Bi
    Minoda, H
    Sakamoto, S
    Yagi, K
    SURFACE SCIENCE, 1997, 372 (1-3) : 1 - 8
  • [3] Growth of Ag on the Bi-terminated Ge/Si(111) surface
    Cherepanov, Vasily
    Voigtlaender, Bert
    SURFACE SCIENCE, 2008, 602 (11) : 1954 - 1956
  • [4] In situ observation of stress and strain evolution during surfactant-mediated growth of Ge on Si
    Asaoka, Hidehito
    Yamazaki, Tatsuya
    Shamoto, Shin-ichi
    ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2011, 67 : C540 - C540
  • [5] Bi surfactant mediated epitaxy of Ge on Si(111)
    Horn-von Hoegen, M
    Heringdorf, FJMZ
    Kammler, M
    Schaeffer, C
    Reinking, D
    Hofmann, KR
    THIN SOLID FILMS, 1999, 343 : 579 - 582
  • [6] Direct stress measurement of Si(111) 7 x 7 reconstruction
    Asaoka, Hidehito
    Yamazaki, Tatsuya
    Yokoyama, Yuta
    Yamaguchi, Kenji
    JOURNAL OF CRYSTAL GROWTH, 2013, 378 : 37 - 40
  • [7] In situ TEM observations of surfactant-mediated epitaxy: Growth of Ge on an Si(111) surface mediated by In
    Minoda, H
    Tanishiro, Y
    Yamamoto, N
    Yagi, K
    SURFACE SCIENCE, 1996, 357 (1-3) : 418 - 421
  • [8] A channeled ion energy loss study of the surfactant-mediated growth of Ge on Si(100)
    Boshart, MA
    Bailes, AA
    Seiberling, LE
    SURFACE SCIENCE, 1996, 348 (03) : L75 - L81
  • [9] Comparison between surfactant-mediated Bi/Ge/Si(111) epitaxy and Ge/Si(111) epitaxy
    Paul, N
    Asaoka, H
    Voigtländer, B
    SURFACE SCIENCE, 2004, 564 (1-3) : 187 - 200
  • [10] Fundamental processes in Si/Si and Ge/Si epitaxy studied by scanning tunneling microscopy during growth
    Voigtländer, B
    SURFACE SCIENCE REPORTS, 2001, 43 (5-8) : 127 - +