Nanometer to micrometer scaled inhomogeneous etching of bulk metallic glasses by ion sputtering

被引：6

作者：

Deng, J. W. ^{[1
]}

Du, K. ^{[1
]}

Wu, B. ^{[1
]}

Sui, M. L. ^{[2
]}

机构：

[1] Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, 72 Wenhua Rd, Shenyang 110016, Peoples R China

[2] Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China

来源：

INTERMETALLICS | 2013年 / 34卷

关键词：

Glasses; metallic; Electron microscopy; transmission; scanning; Scanning tunneling electron microscopy; MEDIUM-RANGE ORDER; MATER; RES; 24; Z-L; ZHANG; Y-M; CHEN; B-J; PARK; X-D; WANG; Q-P; CAO; TENSILE DUCTILITY; RIPPLE FORMATION; U; VAINIO;

D O I：

10.1016/j.intermet.2012.11.007

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In order to faithfully investigate the microscopic and mesoscopic structures of bulk metallic glass (BMG) materials, inhomogeneous contrast in nanometer to micrometer scale in BMG specimens has been throughoutly studied by transmission electron microscopy (TEM), atomic force microscopy (AFM) and scanning electron microscopy (SEM). It is found that ion-milling induced surface roughening and pattern formation are the source of the inhomogeneous contrast in TEM images of BMG samples. Additionally, high resolution TEM and X-ray energy dispersive spectroscopy investigations rule out structure or composition changes in the specimens. The dynamic roughening process during ion-milling as well as saturated pattern sizes are revealed from Zr-, Cu-, Fe- and Mg-based BMGs. The understanding of this inhomogeneous etching in BMG specimens is critical for recently intensive TEM studies on microscopic and mesoscopic inhomogeneities of BMGs. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：75 / 82

页数：8

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