Fabrication of Gating Nanopore Towards Single-Biomolecule Electrical Identification

被引:0
作者
Sasaki, Yuta [1 ]
Ohshiro, Takahito [1 ]
Kawano, Satoyuki [1 ]
Taniguchi, Masateru [1 ]
Kawai, Tomoji [1 ]
机构
[1] Osaka Univ, ISIR, Dept Engn, Mihogaoka 8-1, Ibaraki, Japan
来源
2012 12TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2012年
基金
日本学术振兴会;
关键词
SOLID-STATE NANOPORES; SENSORS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We developed a simple fabrication method for a gating nanopore nanostructure, which is composed of a solid-state nanopore and embodied nanogap-electrode inside the nanopore. The method by using deep reactive-ion etching technique achieved a high-yield rate and easily controlled the pore-length for the gating nanopore device. In addition, by using the gating nanopore, we investigated single-particles I biomolecules that pass through a nanopore only by change in electric current not only flowing parallel to a nanopore, but also flowing between nanogap electrodes perpendicular to the nanopore. From the ionic current intensity and its time profiles, we identify a sample single-particles/bioanalytes. The electrical measurement by using gating nanopore would be a promising methodology for single-biomolecule sensors.
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页数:5
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