The development and use of surface-wave sustained discharges for applications

被引：0
作者：
Moisan, M [1 ]
Hubert, J [1 ]
Margot, J [1 ]
Zakrzewski, Z [1 ]
机构：
[1] Univ Montreal, Grp Phys Plasmas, Montreal, PQ H3C 3J7, Canada
来源：
ADVANCED TECHNOLOGIES BASED ON WAVE AND BEAM GENERATED PLASMAS | 1999年 / 67卷
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D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：23 / 64
页数：42
相关论文
共 141 条
[51]   GENERATION OF A SURFACE-WAVE ENHANCED PLASMA USING COAXIAL-TYPE OPEN-ENDED DIELECTRIC CAVITY [J].
KIMURA, T ;
YOSHIDA, Y ;
MIZUGUCHI, SI .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1995, 34 (8B) :L1076-L1078
[52]  
KOMACHI K, 1990, J MICROWAVE POWER EE, V25, P236
[53]  
KOMACHI K, 1989, J MICROWAVE POWER EE, V24, P140
[54]   ELECTRIC-FIELD IN SURFACE-WAVE-PRODUCED PLASMAS [J].
KOMACHI, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (03) :769-771
[55]   EXPERIMENTAL-EVIDENCE ON THE NONLOCALITY OF THE ELECTRON-DISTRIBUTION FUNCTION [J].
KORTSHAGEN, U .
PHYSICAL REVIEW E, 1994, 49 (05) :4369-4380
[56]   Scaling of microwave slot antenna (SLAN): A concept for efficient plasma generation [J].
Korzec, D ;
Werner, F ;
Winter, R ;
Engemann, J .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (02) :216-234
[57]   REMOTE AND DIRECT MICROWAVE PLASMA DEPOSITION OF HMDSO FILMS - COMPARATIVE-STUDY [J].
KORZEC, D ;
THEIRICH, D ;
WERNER, F ;
TRAUB, K ;
ENGEMANN, J .
SURFACE & COATINGS TECHNOLOGY, 1995, 74-5 (1-3) :67-74
[58]   Large area lubricant removal by use of capacitively coupled RF and slot antenna microwave plasma source [J].
Korzec, D ;
Engemann, J .
SURFACE & COATINGS TECHNOLOGY, 1997, 89 (1-2) :165-176
[59]   Remote deposition of scratch resistant films by use of slot antenna microwave plasma source [J].
Korzec, D ;
Traub, K ;
Werner, F ;
Engemann, J .
THIN SOLID FILMS, 1996, 281 :143-145
[60]  
LAGO V, 1994, 2 EUR S AER SPAC VEH
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