The development and use of surface-wave sustained discharges for applications

被引：0
作者：
Moisan, M [1 ]
Hubert, J [1 ]
Margot, J [1 ]
Zakrzewski, Z [1 ]
机构：
[1] Univ Montreal, Grp Phys Plasmas, Montreal, PQ H3C 3J7, Canada
来源：
ADVANCED TECHNOLOGIES BASED ON WAVE AND BEAM GENERATED PLASMAS | 1999年 / 67卷
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：23 / 64
页数：42
相关论文
共 141 条
  • [1] High optical transparency and good adhesion of diamond films deposited on fused silica windows with a surface-wave sustained plasma
    Airoldi, VT
    Borges, CFM
    Moisan, M
    Guay, D
    [J]. APPLIED OPTICS, 1997, 36 (19): : 4400 - 4402
  • [2] MODELING OF MICROWAVE DISCHARGES IN THE PRESENCE OF PLASMA RESONANCES
    ALIEV, YM
    MAXIMOV, AV
    KORTSHAGEN, U
    SCHLUTER, H
    SHIVAROVA, A
    [J]. PHYSICAL REVIEW E, 1995, 51 (06): : 6091 - 6103
  • [3] Analytical expressions for the axial structure of surface wave sustained plasmas under various regimes of charged particle loss
    Aliev, Yu M.
    Ivanova, K. M.
    Moisan, M.
    Shivarova, A. P.
    [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1993, 2 (03) : 145 - 152
  • [4] ACETONE CONVERSION IN A LOW-PRESSURE OXYGEN-SURFACE WAVE PLASMA
    ARNO, J
    BEVAN, JW
    MOISAN, M
    [J]. ENVIRONMENTAL SCIENCE & TECHNOLOGY, 1995, 29 (08) : 1961 - 1965
  • [5] Detoxification of trichloroethylene in a low-pressure surface wave plasma reactor
    Arno, J
    Bevan, JW
    Moisan, M
    [J]. ENVIRONMENTAL SCIENCE & TECHNOLOGY, 1996, 30 (08) : 2427 - 2431
  • [6] METASTABLE ARGON BEAM SOURCE USING A SURFACE-WAVE SUSTAINED PLASMA
    BANNISTER, ME
    CECCHI, JL
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (01): : 106 - 113
  • [7] DIFFERENCES BETWEEN MICROWAVE AND RF ACTIVATION OF NITROGEN FOR THE PECVD PROCESS
    BARDOS, L
    MUSIL, J
    TARAS, P
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (07) : L79 - L82
  • [8] Microwave surfatron system for plasma processing
    Bardos, L
    Barankova, H
    Berg, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (02): : 474 - 477
  • [9] RADIATION EFFICIENCY OF HG-AR SURFACE-WAVE DISCHARGES
    BENEKING, C
    ANDERER, P
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (10) : 1470 - 1482
  • [10] BERNARD J, 1991, VIDE COUCHES MINCE S, V256
12345678910