Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni-W alloy films

被引：38

作者：

Armstrong, D. E. J. ^{[1
]}

Haseeb, A. S. M. A. ^{[2
]}

Roberts, S. G. ^{[1
]}

Wilkinson, A. J. ^{[1
]}

Bade, K. ^{[3
]}

机构：

[1] Univ Oxford, Dept Mat, Oxford OX1 3PH, England

[2] Univ Malaya, Dept Mech Engn, Kuala Lumpur 50603, Malaysia

[3] Karlsruhe Inst Technol, Inst Mikrostrukturtech IMT, D-76344 Eggenstein Leopoldshafen, Germany

来源：

THIN SOLID FILMS | 2012年 / 520卷 / 13期

基金：

英国工程与自然科学研究理事会;

关键词：

Micromechanics; Nanostructured materials; Fracture; Non-ferrous alloys; MECHANICAL-PROPERTIES; NICKEL; INDENTATION; STRENGTH; FABRICATION; HARDNESS; TESTS;

D O I：

10.1016/j.tsf.2012.02.059

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanocrystalline nickel-tungsten alloys have great potential in the fabrication of components for microelectromechanical systems. Here the fracture toughness of Ni-12.7 at.%W alloy micro-cantilever beams was investigated. Micro-cantilevers were fabricated by UV lithography and electrodeposition and notched by focused ion beam machining. Load was applied using a nanoindenter and fracture toughness was calculated from the fracture load. Fracture toughness of the Ni-12.7 at.%W was in the range of 1.49-5.14 MPa root m. This is higher than the fracture toughness of Si (another important microelectromechanical systems material), but considerably lower than that of electrodeposited nickel and other nickel based alloys. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：4369 / 4372

页数：4

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