Monolithic integration of three-dimensional multimode interference couplers with silicon photonic wires via self-profile transformation

被引：0
|
作者：
Chiu, Wei-Chao [1 ]
Lu, Cheng-Yen [1 ]
Lee, Ming-Chang M. [1 ]
机构：
[1] Natl Tsing Hua Univ, Inst Photon Technol, Hsinchu 30013, Taiwan
来源：
2008 5TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS | 2008年
关键词：
D O I：
10.1109/GROUP4.2008.4638146
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel 3-D MMI coupler with silicon photonic wires is demonstrated using self-profile transformation for the first time. The preliminary simulation results show the low excess loss of 0.27 dB.
引用
收藏
页码：206 / 208
页数：3
相关论文
共 34 条
  • [1] Monolithically integrated low-loss silicon photonic wires and three-dimensional tapered couplers fabricated by self-profile transformation
    Lee, Ming-Chang M.
    Chiu, Wei-Chao
    Yang, Tse-Ming
    Chen, Chin-Hung
    APPLIED PHYSICS LETTERS, 2007, 91 (19)
  • [2] Monolithic Integration of 2-D Multimode Interference Couplers and Silicon Photonic Wires
    Chiu, Wei-Chao
    Lu, Cheng-Yen
    Lee, Ming-Chang M.
    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2011, 17 (03) : 540 - 545
  • [3] Fabrication of Low-Loss Silicon Photonic Wires by Self-Profile Transformation and Applications in 3-D Photonic Integration and Nonlinear Optics
    Lee, Ming-Chang M.
    Chiu, Wei-Chao
    Yang, Tse-Ming
    Chen, Chin-Hung
    Lu, Cheng-Yen
    Lin, Gong-Ru
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 2010, 46 (05) : 650 - 657
  • [4] Three-dimensional method for simulation of multimode interference couplers
    Telefonica Investigacion y, Desarrollo, Madrid, Spain
    J Lightwave Technol, 11 (2296-2299):
  • [5] Monolithic Three-Dimensional Integration of Carbon Nanotube FETs with Silicon CMOS
    Shulaker, Max M.
    Saraswat, Krishna
    Wong, H. -S. Philip
    Mitra, Subhasish
    2014 SYMPOSIUM ON VLSI TECHNOLOGY (VLSI-TECHNOLOGY): DIGEST OF TECHNICAL PAPERS, 2014,
  • [6] Rapid partial melt crystallization of silicon for monolithic three-dimensional integration
    Witte, D. J.
    Pickard, D. S.
    Crnogorac, F.
    Pianetta, P.
    Pease, R. F. W.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 1989 - 1992
  • [7] Optimization of through silicon via for three-dimensional integration
    Du, Li
    Shi, Tielin
    Chen, Pengfei
    Su, Lei
    Shen, Junjie
    Shao, Jie
    Liao, Guanglan
    MICROELECTRONIC ENGINEERING, 2015, 139 : 31 - 38
  • [8] Integration of self-assembled three-dimensional photonic crystals onto structured silicon wafers
    Ye, Jianhui
    Zentel, Rudolf
    Arpiainen, Sanna
    Ahopelto, Jouni
    Jonsson, Fredrik
    Romanov, Sergei G.
    Torres, Clivia M. Sotomayor
    LANGMUIR, 2006, 22 (17) : 7378 - 7383
  • [9] Wafer-level three-dimensional monolithic integration for heterogeneous silicon ICs
    Gutmann, RJ
    Lu, JQ
    Devarajan, S
    Zeng, AY
    Rose, K
    2004 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS, 2004, : 45 - 48
  • [10] Self-assembly of three-dimensional photonic crystals on structured silicon wafers
    Ferrand, P
    Egen, M
    Griesebock, B
    Ahopelto, J
    Müller, M
    Zentel, R
    Romanov, SG
    Torres, CMS
    APPLIED PHYSICS LETTERS, 2002, 81 (15) : 2689 - 2691
1234