Organic materials challenges for 193 nm imaging

被引：83

作者：

Reichmanis, E ^{[1
]}

Nalamasu, O ^{[1
]}

Houlihan, FM ^{[1
]}

机构：

[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA

来源：

ACCOUNTS OF CHEMICAL RESEARCH | 1999年 / 32卷 / 08期

关键词：

D O I：

10.1021/ar970150n

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

[No abstract available]

引用

页码：659 / 667

页数：9

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