Accurate Numerical Model for Surface Scattering, Grain Boundary Scattering, and Anomalous Skin Effect of Copper Wires

被引：0
|
作者：
Abhaspour, Elhameh [1 ]
Sarvari, Reza [1 ]
Akbarzadeh, Alireza [1 ]
Rostami, Melika [1 ]
机构：
[1] Sharif Univ Technol, Tehran, Iran
来源：
PROCEEDINGS OF THE 2013 IEEE 5TH INTERNATIONAL NANOELECTRONICS CONFERENCE (INEC) | 2013年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we have studied both DC size effect and anomalous skin effect caused by surface and grain boundary scattering on the resistivity of Cu thin films by a Monte Carlo method. Contribution of each scattering mechanism and the interaction between them are analyzed separately. A simple and fast numerical recursive method is also introduced to guess the structure of electric field and distribution of current inside the thin film to evaluate the surface resistance instead of complicated analytical formulas.
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页码：209 / 210
页数：2
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