Chemical Vapor Deposition of Large-Size Monolayer MoSe2 Crystals on Molten Glass

被引：280

作者：

Chen, Jianyi ^{[1
,2
]}

Zhao, Xiaoxu ^{[1
,2
]}

Tan, Sherman J. R. ^{[1
,2
]}

Xu, Hai ^{[1
,2
]}

Wu, Bo ^{[1
,2
]}

Liu, Bo ^{[1
,2
,3
]}

Fu, Deyi ^{[1
,2
]}

Fu, Wei ^{[1
,2
]}

Geng, Dechao ^{[1
,2
]}

Liu, Yanpeng ^{[1
,2
]}

Liu, Wei ^{[1
,2
]}

Tang, Wei ^{[1
,2
]}

Li, Linjun ^{[1
,2
]}

Zhou, Wu ^{[4
,5
]}

Sum, Tze Chien ^{[3
]}

Loh, Kian Ping ^{[1
,2
]}

机构：

[1] Natl Univ Singapore, Graphene Res Ctr, 6 Sci Dr 2, Singapore 117546, Singapore

[2] Natl Univ Singapore, Dept Chem, 6 Sci Dr 2, Singapore 117546, Singapore

[3] Nanyang Technol Univ, Sch Phys & Math Sci, Div Phys & Appl Phys, 21 Nanyang Link, Singapore 637371, Singapore

[4] Univ Chinese Acad Sci, CAS Key Lab Vacuum Sci, Sch Phys Sci, Beijing 100049, Peoples R China

[5] Oak Ridge Natl Lab, Mat Sci & Technol Div, Oak Ridge, TN 37831 USA

来源：

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY | 2017年 / 139卷 / 03期

基金：

新加坡国家研究基金会;

关键词：

SINGLE-CRYSTAL; ATOMIC LAYERS; MONO LAYER; LARGE-AREA; GROWTH; GRAPHENE; GRAINS; FILMS;

D O I：

10.1021/jacs.6b12156

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report the fast growth of high-quality millimeter-size monolayer MoSe2 crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe2 crystals with sizes reaching 2.5 mm, and with a room-temperature carrier mobility up to 95 cm2(/)(V.s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS2 crystals. Our results demonstrate that "liquid-state" glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).

引用

页码：1073 / 1076

页数：4

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