Friction measurement on free standing plates using atomic force microscopy

被引:8
作者
Tang, X. S. [1 ]
Loke, Y. C. [1 ]
Lu, P. [1 ]
Sinha, Sujeet K. [2 ]
O'Shea, S. J. [1 ]
机构
[1] ASTAR, Inst Mat Res & Engn, Singapore 117602, Singapore
[2] Indian Inst Technol, Dept Mech Engn, Kanpur 208016, Uttar Pradesh, India
关键词
POLYCRYSTALLINE SILICON; LATERAL STIFFNESS; ASPERITY CONTACT; ROUGH SURFACES; AMONTONS LAW; ADHESION; TRIBOLOGY; STICTION; SINGLE; PROBE;
D O I
10.1063/1.4773534
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A method is introduced to measure friction on small, free standing objects, specifically microfabricated silicon plates, based on atomic force microscopy (AFM). An AFM tip is brought into contact with the plate resting on a substrate. The substrate is displaced laterally and, provided the AFM tip does not slide over the plate, the twisting of the AFM cantilever is used to measure the friction of the underlying plate-substrate interface. The method can measure nano-Newton to micro-Newton forces (both friction and applied load) and provides a means to measure friction of macroscopic structures at low load. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4773534]
引用
收藏
页数:9
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