DIRECT-WRITE SINGLE-WALLED CARBON NANOTUBE SERPENTINES USING MICRO CHEMICAL VAPOR DEPOSITION

被引：0

作者：

Zhou, Qin ^{[1
]}

Huang, Jiming ^{[1
]}

Lin, Liwei ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2012年

关键词：

GROWTH; QUARTZ;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents the capability to grow and deposit single-walled carbon nanotubes (SWNTs) with good position and orientation control toward fully controlled nanomanufacturing. A miniaturized growth platform as the micro chemical vapor deposition system is built by a micromachining process for the synthesis of SWNTs. A collector substrate is placed 50 microns above the growth platform for the depositions of SWNTs. The movements of the collector are continuously controlled by an x-y nanopositioner. Experimentally, depositions of SWNTs in serpentine-shape have been demonstrated. A growth model is proposed and supported by results from various guiding gas flow rates and substrate movements.

引用

页数：4

共 18 条

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