Nonideal Optical Cavity Structure of Superconducting Nanowire Single-Photon Detector

被引：10

作者：

Li, Hao ^{[1
]}

Zhang, Weijun ^{[1
]}

You, Lixing ^{[1
]}

Zhang, Lu ^{[1
]}

Yang, Xiaoyan ^{[1
]}

Liu, Xiaoyu ^{[1
]}

Chen, Sijing ^{[1
]}

Lv, Chaolin ^{[1
]}

Peng, Wei ^{[1
]}

Wang, Zhen ^{[1
]}

Xie, Xiaoming ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2014年 / 20卷 / 06期

基金：

中国国家自然科学基金;

关键词：

Nanowire; niobium nitride; single photon detector; HIGH-SPEED; EFFICIENCY; SYSTEM;

D O I：

10.1109/JSTQE.2014.2331955

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Optical cavity structure has been proven to be a crucial factor for obtaining high detection efficiency in superconducting nanowire single-photon detector (SNSPD). Practically, complicated fabrication processes may result in a nonideal optical cavity structure. The cross-sectional transmission electron microscope image of SNSPD fabricated in this study shows unexpected arc-shaped optical cavities, which could have originated due to the over-etching of SiO2 layer while defining NbN nanowire. The effects of the arc-shaped optical cavity structure, such as the wavelength dependence of the optical absorption efficiency for different polarization, were analyzed by performing optical simulations using finite-difference time-domain method. The central wavelength of the device is found to exhibit a blue shift owing to the arced cavity structure. This effect is equivalent to the flat cavity with a reduced height. The results may give interesting reference for SNSPD design and fabrication.

引用

页码：198 / 202

页数：5

共 24 条

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