Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health Monitoring

被引:23
作者
Calisgan, Sila Deniz [1 ]
Rajaram, Vageeswar [1 ]
Kang, Sungho [1 ]
Risso, Antea [1 ]
Qian, Zhenyun [2 ]
Rinaldi, Matteo [1 ]
机构
[1] Northeastern Univ, Northeastern SMART Ctr, Boston, MA 02115 USA
[2] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA
关键词
Polymers; Chemicals; Switches; Detectors; Gold; Sensitivity; Cantilever; chemical detection; gas sensor; micromechanical; microswitch; plant defense; polymer; volatile organic chemical; zero-power; CANTILEVER ARRAY; VOLATILE; EMISSIONS;
D O I
10.1109/JMEMS.2020.3007309
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, for the first time we demonstrate zero-power volatile-organic-chemical (VOC) detectors based on micromechanical switches suitable for plant health monitoring. Differently from state-of-the-art active chemical sensors, the device presented here exploits a completely passive, chemically-sensitive switch based on a bimaterial micro-cantilever and a passive switch-based readout mechanism to detect VOCs exceeding a pre-determined concentration released by unhealthy plants. When exposed to target VOCs, the polymer/metal bimaterial beam bends downward and trigger the switch due to the stress induced from the absorption of chemicals in the polymer layer. Here we show experimental demonstrations of detecting toluene, hexenol (cis-3-Hexen-1-ol, a chemical released from plants under attack by pests) and ethanol, respectively, with our fabricated prototypes. The demonstrated high sensitivity to ethanol (similar to 8 nm/ppm) and hexenol (similar to 3.3 nm/ppm) was achieved by the optimization of device geometries showing a great promise of the proposed technology to ultimately achieve 10s ppm detection limit (with a sub-micron contact gap and voltage bias) which is required for the device operation in close proximity to a plant in an open environment. [2020-0190]
引用
收藏
页码:755 / 761
页数:7
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