Properties of Sb-doped SnO2 transparent conductive thin films deposited by radio-frequency magnetron sputtering

被引：51
作者：
Yang, Wenhao
Yu, Shihui
Zhang, Yang
Zhang, Weifeng [1 ]
机构：
[1] Henan Univ, Key Lab Photovolta Mat Henan Prov, Kaifeng 475004, Peoples R China
来源：
THIN SOLID FILMS | 2013年 / 542卷
关键词：
Antimony-doped tin oxide; Thin films; Optical properties; Electrical properties; Organic solar cells; Sputtering; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; ZNO FILMS; TEMPERATURE; SUBSTRATE; GROWTH;
D O I：
10.1016/j.tsf.2013.06.077
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Transparent conducting Sb-doped SnO2 (ATO) thin films were prepared on quartz substrates by radio-frequency magnetron sputtering technique. The X-ray diffraction measurement shows that the as-deposited ATO film is of tetragonal crystal structure. Electrical and optical properties were investigated by Hall and optical measurements. The resistivity and optical transmittance of the ATO thin films are of the order of 10(-3) Omega . cm and over 85%, respectively. The lowest electrical resistivity of the films was found to be about 1.99 x 10(-3) Omega . cm. Finally, the organic solar cell with the ATO thin film as an anode was prepared, and a power conversion efficiency of 1.11% was achieved. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：285 / 288
页数：4
相关论文
共 21 条
  • [1] Transparent and conductive ZnO:Al thin films grown by pulsed magnetron sputtering in current or voltage regulation modes
    Guillen, C.
    Herrero, J.
    [J]. VACUUM, 2008, 82 (06) : 668 - 672
  • [2] Microstructure, optical, and electrical properties of p-type SnO thin films
    Guo, W.
    Fu, L.
    Zhang, Y.
    Zhang, K.
    Liang, L. Y.
    Liu, Z. M.
    Cao, H. T.
    Pan, X. Q.
    [J]. APPLIED PHYSICS LETTERS, 2010, 96 (04)
  • [3] Investigation on structural, electrical and optical properties of tungsten-doped tin oxide thin films
    Huang, Yanwei
    Li, Guifeng
    Feng, Jiahan
    Zhang, Qun
    [J]. THIN SOLID FILMS, 2010, 518 (08) : 1892 - 1896
  • [4] Transparent conducting Sb-doped SnO2 thin films grown by pulsed-laser deposition
    Kim, H
    Piqué, A
    [J]. APPLIED PHYSICS LETTERS, 2004, 84 (02) : 218 - 220
  • [5] Deposition of Al-doped ZnO films on polyethylene naphthalate substrate with radio frequency magnetron sputtering
    Kim, Jung-Min
    Thiyagarajan, P.
    Rhee, Shi-Woo
    [J]. THIN SOLID FILMS, 2010, 518 (20) : 5860 - 5865
  • [6] Surface and bulk properties of sputter deposited undoped and Sb-doped SnO2 thin films
    Koerber, Christoph
    Agoston, Peter
    Klein, Andreas
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2009, 139 (02): : 665 - 672
  • [7] Structural, optical, and electrical properties of AZO films by tilted angle sputtering method
    Leem, J. W.
    Yu, J. S.
    [J]. THIN SOLID FILMS, 2010, 518 (22) : 6285 - 6288
  • [8] Influence of Ar/O2 ratio on the properties of transparent conductive ZnO:: Ga films prepared by DC reactive magnetron sputtering
    Ma, Quan-Bao
    Ye, Zhi-Zhen
    He, Hai-Ping
    Zhu, Li-Ping
    Wang, Jing-Rui
    Zhao, Bing-Hui
    [J]. MATERIALS LETTERS, 2007, 61 (11-12) : 2460 - 2463
  • [9] Mobility enhancement of p-type SnO2 by In-Ga co-doping
    Mao, Qinan
    Ji, Zhenguo
    Zhao, Lina
    [J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2010, 247 (02): : 299 - 302
  • [10] Preparation of reactively sputtered Sb-doped SnO2 thin films: Structural, electrical and optical properties
    Montero, J.
    Herrero, J.
    Guillen, C.
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2010, 94 (03) : 612 - 616
123