Properties of Sb-doped SnO2 transparent conductive thin films deposited by radio-frequency magnetron sputtering

被引：52
作者：
Yang, Wenhao
Yu, Shihui
Zhang, Yang
Zhang, Weifeng [1 ]
机构：
[1] Henan Univ, Key Lab Photovolta Mat Henan Prov, Kaifeng 475004, Peoples R China
来源：
THIN SOLID FILMS | 2013年 / 542卷
关键词：
Antimony-doped tin oxide; Thin films; Optical properties; Electrical properties; Organic solar cells; Sputtering; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; ZNO FILMS; TEMPERATURE; SUBSTRATE; GROWTH;
D O I：
10.1016/j.tsf.2013.06.077
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Transparent conducting Sb-doped SnO2 (ATO) thin films were prepared on quartz substrates by radio-frequency magnetron sputtering technique. The X-ray diffraction measurement shows that the as-deposited ATO film is of tetragonal crystal structure. Electrical and optical properties were investigated by Hall and optical measurements. The resistivity and optical transmittance of the ATO thin films are of the order of 10(-3) Omega . cm and over 85%, respectively. The lowest electrical resistivity of the films was found to be about 1.99 x 10(-3) Omega . cm. Finally, the organic solar cell with the ATO thin film as an anode was prepared, and a power conversion efficiency of 1.11% was achieved. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：285 / 288
页数：4
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