InGaP lattice-mismatched LPE growth on GaAs substrates by epitaxial lateral overgrowth technique

被引:5
作者
Nakayama, S [1 ]
Kaneko, M [1 ]
Aizawa, S [1 ]
Kashiwa, K [1 ]
Takahashi, NS [1 ]
机构
[1] Keio Univ, Fac Sci & Technol, Dept Elect & Elect Engn, Yokohama, Kanagawa 2238522, Japan
关键词
liquid phase epitaxy; selective epitaxy; semiconducting indium gallium phosphide;
D O I
10.1016/S0022-0248(01)02228-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The application of the InGaAs/InGaP double-heterostructure laser increases the band offset between the cladding layer and the active layer more than the use of conventional InGaAsP,InP lasers. We propose InGaP lattice-mismatched liquid phase epitaxy on a GaAs substrate by the epitaxial lateral overgrowth (ELO) technique. To obtain the InGaP (lambda = 820 nm) cladding layer of the InGaAs (lambda = 1.3 mum)/InGaP DH laser, Ga liquid atomic fractions X-Ga(L) were gradually reduced from those of the lattice-matching conditions. The InGalP lattice-mismatched growth on both the GaAs(100) and (111)B substrates were successfully carried out by adopting the ELO technique. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:132 / 136
页数:5
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