共 5 条
InGaP lattice-mismatched LPE growth on GaAs substrates by epitaxial lateral overgrowth technique
被引:5
作者:
Nakayama, S
[1
]
Kaneko, M
[1
]
Aizawa, S
[1
]
Kashiwa, K
[1
]
Takahashi, NS
[1
]
机构:
[1] Keio Univ, Fac Sci & Technol, Dept Elect & Elect Engn, Yokohama, Kanagawa 2238522, Japan
关键词:
liquid phase epitaxy;
selective epitaxy;
semiconducting indium gallium phosphide;
D O I:
10.1016/S0022-0248(01)02228-X
中图分类号:
O7 [晶体学];
学科分类号:
0702 ;
070205 ;
0703 ;
080501 ;
摘要:
The application of the InGaAs/InGaP double-heterostructure laser increases the band offset between the cladding layer and the active layer more than the use of conventional InGaAsP,InP lasers. We propose InGaP lattice-mismatched liquid phase epitaxy on a GaAs substrate by the epitaxial lateral overgrowth (ELO) technique. To obtain the InGaP (lambda = 820 nm) cladding layer of the InGaAs (lambda = 1.3 mum)/InGaP DH laser, Ga liquid atomic fractions X-Ga(L) were gradually reduced from those of the lattice-matching conditions. The InGalP lattice-mismatched growth on both the GaAs(100) and (111)B substrates were successfully carried out by adopting the ELO technique. (C) 2002 Elsevier Science B.V. All rights reserved.
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页码:132 / 136
页数:5
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