Surface evaluation of high-precision monolithic mirror for soft X-ray focusing

被引：0

作者：

Kume, T. ^{[1
]}

Matsuzawa, Y. ^{[1
]}

Hiraguri, K. ^{[1
]}

Takeo, Y. ^{[2
,3
]}

Kimura, T. ^{[2
]}

Kishimoto, H. ^{[3
]}

Senba, Y. ^{[3
]}

Ohashi, H. ^{[3
]}

Hashizume, H. ^{[1
]}

Mimura, H. ^{[4
]}

机构：

[1] Natsume Opt Corp, Technol Ctr, 1200-29 Kawaji, Iida, Nagano 3992431, Japan

[2] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan

[3] Japan Synchrotron Radiat Res Inst JASRI, I-1-1 Kouto, Sayo Cho, Hyogo 6795198, Japan

[4] Univ Tokyo, Sch Engn, Dept Precis Engn, 7-3-1 Hongo,Bunkyo Ku, Tokyo 1138656, Japan

来源：

ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS XVII | 2022年 / 12240卷

关键词：

soft X-ray; X-ray mirror; figure measurement;

D O I：

10.1117/12.2633765

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

For application in the soft X-ray region, focusing mirrors having a steep shape with small radii of curvature of several tens to hundreds of millimeters and a deep sag of a few millimeters have recently been designed. These mirrors are difficult to fabricate with high accuracy owing to the challenges in figure measurement. In this study, we demonstrate the surface measurement of a flat substrate and soft X-ray Wolter mirror using a tactile profiler. The comparison with a stitching interferometry image of the flat substrate showed an agreement of mid- to high-spatial-frequency errors. The tactile measurement of the Wolter mirror exhibited a root-mean-square figure error of 2.49 nm.

引用

页数：5

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