A method for accurate temperature measurement using infrared thermal camera

被引:4
|
作者
Tokunaga, Tomoharu [1 ]
Narushima, Takashi [2 ]
Yonezawa, Tetsu [2 ]
Sudo, Takayuki [3 ]
Okubo, Shuichi [3 ]
Komatsubara, Shigeyuki [3 ]
Sasaki, Katsuhiro [1 ]
Yamamoto, Takahisa [1 ]
机构
[1] Nagoya Univ, Dept Quantum Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[2] Hokkaido Univ, Fac Engn, Div Mat Sci & Engn, Kita Ku, Sapporo, Hokkaido 0608628, Japan
[3] NEC Avio Infrared Technol Co Ltd, Shinagawa Ku, Tokyo 1410031, Japan
来源
JOURNAL OF ELECTRON MICROSCOPY | 2012年 / 61卷 / 04期
关键词
temperature measurement; temperature distribution; heater; infrared radiation; thermal camera; electron microscopy; IN-SITU TEM; PHASE-TRANSFORMATION; ELECTRON-MICROSCOPY; HIGH-RESOLUTION; GROWTH; ALLOY;
D O I
10.1093/jmicro/dfs042
中图分类号
TH742 [显微镜];
学科分类号
摘要
The temperature distribution on a centre-holed thin foil of molybdenum, used as a sample and heated using a sample-heating holder for electron microscopy, was measured using an infrared thermal camera. The temperature on the heated foil area located near the heating stage of the heating holder is almost equal to the temperature on the heating stage. However, during the measurement of the temperature at the edge of the hole of the foil located farthest from the heating stage, a drop in temperature should be taken into consideration; however, so far, no method has been developed to locally measure the temperature distribution on the heated sample. In this study, a method for the accurate measurement of temperature distribution on heated samples for electron microscopy is discussed.
引用
收藏
页码:223 / 227
页数:5
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