Modelling and simulation of a thermal flow sensor for determining the flow speed and thermal properties of binary gas mixtures

被引：2
作者：
Zhu, Y. Q. [1 ,2 ]
Hepp, C. J. [3 ]
Urban, G. A. [2 ]
机构：
[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Jiangsu, Peoples R China
[2] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Sensors, Georges Koehler Allee 103, D-79100 Freiburg, Germany
[3] Innovat Sensor Technol IST AG, Stegruetistr 14, CH-9642 Ebnat Kappel, Switzerland
来源：
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016 | 2016年 / 168卷
关键词：
Thermal flow sensor; FEM simulation; Gas mixtures; Thermal properties determination;
D O I：
10.1016/j.proeng.2016.11.332
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A thermal flow sensor has been reported to measure simultaneously the thermal conductivity and flow speed of binary gas mixtures. It features low power consumption and a simple geometry. In this work, by means of 3D modelling and numerical simulations it is shown that the volumetric heat capacity of gas mixtures can also be detected by evaluating the heater's temperature of the sensor under flowing conditions. As a result, for those binary gas mixtures with similar thermal conductivity but different volumetric heat capacity, such as CO2-Ar, the gas concentration can also be determined with a high accuracy. (C) 2016 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license.
引用
收藏
页码：1028 / 1031
页数：4
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