X-ray scattering by porous silicon modulated structures

被引：2

作者：

Lomov, A. A. ^{[1
]}

Punegov, V. I. ^{[2
]}

Karavanskii, V. A. ^{[3
]}

Vasil'ev, A. L. ^{[4
]}

机构：

[1] Russian Acad Sci, Inst Phys & Technol, Moscow 117218, Russia

[2] Russian Acad Sci, Komi Res Ctr, Ural Branch, Syktyvkar 167610, Russia

[3] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia

[4] Russian Acad Sci, AV Shubnikov Crystallog Inst, Moscow 119333, Russia

来源：

CRYSTALLOGRAPHY REPORTS | 2012年 / 57卷 / 02期

基金：

俄罗斯基础研究基金会;

关键词：

DIFFRACTION; MORPHOLOGY;

D O I：

10.1134/S1063774511060162

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

A multilayered porous structure formed as a result of the anodization of a Si(111)(Sb) substrate in an HF:C2H5OH (1: 2) solution with a periodically alternating current has been investigated by high-resolution X-ray diffraction. It is established that, despite 50% porosity, a thickness of 30 mu m, and significant strain (4 x 10(-3)), the porous silicon structure consists mainly of coherent crystallites. A model of coherent scattering from a multilayered periodic porous structure is proposed within the dynamic theory of diffraction. It is shown that the presence of gradient strains of 5 x 10(-4) or higher leads to phase loss upon scattering from porous superlattices and the suppression of characteristic satellites in rocking curves.

引用

页码：185 / 192

页数：8

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