Critical aspects on testing aspheres in interferometric setups

被引：17

作者：

Schillke, F ^{[1
]}

机构：

[1] Carl Zeiss AG, Technol Zentrum Opt Messtech, Oberkochen, Germany

来源：

OPTICAL FABRICATION AND TESTING | 1999年 / 3739卷

关键词：

interferometry; aspheres; absolute accuracy;

D O I：

10.1117/12.360159

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Several critical aspects when testing aspherical surfaces by means of interferometry are reported. The aspheres are in the range of some microns to some 100 microns of deviation from best fitting spheres. The required accuracy is a few nm. A compensating system has to be used to transform the interferometer's spherical wavefront to a wavefront that fits the asphere under test. Some special aspects will be discussed that are different to the test of spheres. Effects on the wavefront from lateral distortion, field curvature, and alignment of the compensating system need to be handled. The most problematic item up to now is the limited accuracy of the rotational symmetrical errors. The calibration of those errors still is much more uncertain than calibrations of unsymmetric errors or complete calibrations of spheres.

引用

页码：317 / 324

页数：8