Spectroscopic analysis of femtosecond laser-induced gas breakdown

plasma generated by the interaction of a femtosecond laser pulse with gas has been analyzed using time- and space-resolved emission spectroscopy. The laser beam has been focused with a microscope objective into different gases (air, Ar, He) at pressures ranging from 10(2) to 10(5) Pa. From the analysis of spectral line emission from ions and neutral atoms, the plasma parameters and the plasma composition have been determined as a function of time and space. Furthermore, the generation of fast electrons and/or VUV radiation by the femtosecond laser interaction with the gas was brought to the fore. From the time-and space-evolution of the plasma parameters, a rough estimation of initial values of electron density and refraction index in the focal volume has been performed. These results are compared to analysis of the laser beam transmitted by the plasma. The latter show that only a small fraction of the laser energy is absorbed by the plasma while the spatial distribution of the transmitted laser beam is strongly perturbed by the plasma, which acts like a defocusing lens. However, in ambient helium, the plasma defocusing is weak due to the high ionization potential of helium. The understanding of femtosecond laser-induced gas breakdown is useful for process optimization in femtosecond laser applications like micromachining or surface microanalysis, etc. (C) 2003 Elsevier B.V. All rights reserved.