REM study of the Si(III) vicinal surfaces

In this paper, reflection electron microscope (REM) studies of surfaces are briefly reviewed and recent REM studies of Si(111) vicinal surfaces are described. Triple-layer-height steps are formed on the vicinal surfaces inclined by angles of about 1.5-5 degrees toward the [(1) over bar (1) over bar 2] direction. The triple steps are seen below the phase transition temperature between the 7 x 7 and 1 x 1 structures and break into single steps above the phase transition temperature. Vicinal surfaces inclined toward the [11 (2) over bar] direction showed a so-called hill-and-valley structure that is composed of the (111) and an unindexed surface terraces below the phase transition temperature. The hill-and-valley structure disappeared above the phase transition temperature.