T-Shape Suspended Silicon Nitride Ring Resonator for Optical Sensing Applications

被引：16

作者：

Feng, Jijun ^{[1
]}

Akimoto, Ryoichi ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Elect & Photon Res Inst, Tsukuba, Ibaraki 3058568, Japan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2015年 / 27卷 / 15期

基金：

日本学术振兴会;

关键词：

Optical resonance; silicon nitride; suspended; integrated optics; sensitivity; LABEL-FREE; FABRICATION;

D O I：

10.1109/LPT.2015.2432124

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A T-shape suspended silicon nitride racetrack ring resonator sitting on a silicon dioxide pedestal is experimentally demonstrated. Compared with unsuspended device, it allows an enhanced interaction with the surrounded environment while maintaining a high quality factor. The resonator consists of a directional coupler with a waveguide width of 1.3 mu m and a ring structure with curve radius of 20 mu m. More than 1.6 x 10(4) quality factor at a wavelength of 1550.4 nm can be obtained, with a moderate extinction ratio of similar to 9.2 dB and a free-spectral range of 5.48 nm. The measured device sensitivity is similar to 247 nm/RIU. The device

引用

页码：1601 / 1604

页数：4

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