T-Shape Suspended Silicon Nitride Ring Resonator for Optical Sensing Applications

被引：15

作者：

Feng, Jijun ^{[1
]}

Akimoto, Ryoichi ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Elect & Photon Res Inst, Tsukuba, Ibaraki 3058568, Japan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2015年 / 27卷 / 15期

基金：

日本学术振兴会;

关键词：

Optical resonance; silicon nitride; suspended; integrated optics; sensitivity; LABEL-FREE; FABRICATION;

D O I：

10.1109/LPT.2015.2432124

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A T-shape suspended silicon nitride racetrack ring resonator sitting on a silicon dioxide pedestal is experimentally demonstrated. Compared with unsuspended device, it allows an enhanced interaction with the surrounded environment while maintaining a high quality factor. The resonator consists of a directional coupler with a waveguide width of 1.3 mu m and a ring structure with curve radius of 20 mu m. More than 1.6 x 10(4) quality factor at a wavelength of 1550.4 nm can be obtained, with a moderate extinction ratio of similar to 9.2 dB and a free-spectral range of 5.48 nm. The measured device sensitivity is similar to 247 nm/RIU. The device

引用

页码：1601 / 1604

页数：4

共 23 条

[1] Label-free, single-molecule detection with optical microcavities
Armani, Andrea M.
Kulkarni, Rajan P.
Fraser, Scott E.
Flagan, Richard C.
Vahala, Kerry J.
[J]. SCIENCE, 2007, 317 (5839) : 783 - 787
[2] Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding
Bauters, Jared F.
Heck, Martijn J. R.
John, Demis D.
Barton, Jonathon S.
Bruinink, Christiaan M.
Leinse, Arne
Heideman, Rene G.
Blumenthal, Daniel J.
Bowers, John E.
[J]. OPTICS EXPRESS, 2011, 19 (24): : 24090 - 24101
[3] Preparation and properties of clean Si3N4 surfaces
Bermudez, VM
Perkins, FK
[J]. APPLIED SURFACE SCIENCE, 2004, 235 (04) : 406 - 419
[4] Experimental characterization of a silicon photonic biosensor consisting of two cascaded ring resonators based on the Vernier-effect and introduction of a curve fitting method for an improved detection limit
Claes, Tom
Bogaerts, Wim
Bienstman, Peter
[J]. OPTICS EXPRESS, 2010, 18 (22): : 22747 - 22761
[5] Design and fabrication of SOI micro-ring resonators based on sub-wavelength grating waveguides
Donzella, Valentina
Sherwali, Ahmed
Flueckiger, Jonas
Grist, Samantha M.
Fard, Sahba Talebi
Chrostowski, Lukas
[J]. OPTICS EXPRESS, 2015, 23 (04): : 4791 - 4803
[6] Refractometric sensing of Li salt with visible-light Si3N4 microdisk resonators
Doolin, C.
Doolin, P.
Lewis, B. C.
Davis, J. P.
[J]. APPLIED PHYSICS LETTERS, 2015, 106 (08)
[7] Vertically Coupled Silicon Nitride Microdisk Resonant Filters
Feng, Jijun
Akimoto, Ryoichi
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2014, 26 (23) : 2391 - 2394
[8] A Three-Dimensional Silicon Nitride Polarizing Beam Splitter
Feng, Jijun
Akimoto, Ryoichi
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2014, 26 (07) : 706 - 709
[9] Goykhman I., 2010, APPL PHYS LETT, V97
[10] High Quality Planar Silicon Nitride Microdisk Resonators for Integrated Photonics in the Visible Wavelength Range
Hosseini, Ehsan Shah
Yegnanarayanan, Siva
Atabaki, Amir Hossein
Soltani, Mohammad
Adibi, Ali
[J]. OPTICS EXPRESS, 2009, 17 (17): : 14543 - 14551

← 1 2 3 →