In-situ formation of Ge-rich SiGe alloy by electron beam evaporation and the effect of post deposition annealing on the energy band gap
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作者:
Tah, Twisha
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HBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, IndiaHBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
Tah, Twisha
[1
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Singh, Ch. Kishan
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HBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, IndiaHBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
Singh, Ch. Kishan
[1
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Amirthapandian, S.
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HBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, IndiaHBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
Amirthapandian, S.
[1
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Madapu, K. K.
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HBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, IndiaHBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
Madapu, K. K.
[1
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Sagdeo, A.
[2
,3
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Ilango, S.
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HBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, IndiaHBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
Ilango, S.
[1
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Mathews, T.
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HBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, IndiaHBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
Mathews, T.
[1
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Dash, S.
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VIT Univ, CBCMT, Vellore 632014, Tamil Nadu, IndiaHBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
Dash, S.
[4
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机构:
[1] HBNI, Indira Gandhi Ctr Atom Res, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
[2] Raja Ramanna Ctr Adv Technol, Synchrotrons Utilizat Sect, Indore 452013, Madhya Pradesh, India
[3] Homi Bhabha Natl Inst, Bombay 400094, Maharashtra, India
[4] VIT Univ, CBCMT, Vellore 632014, Tamil Nadu, India
We report the synthesis of polycrystalline (poly)-SiGe alloy thin films through solid state reaction of Si/Ge multilayer thin films on Si and glass substrates at low temperature of 500 degrees C. The pristine thin film was deposited using electron beam evaporation with optimized in-situ substrate heating. Our results show the co-existence of amorphous Si (a-Si) phase along with the poly-SiGe phase in the pristine thin film. The a-Si phase was found to subsume into the SiGe phase upon post deposition annealing in the temperature range from 600 degrees to 800 degrees C. Additionally, dual energy band gaps could be observed in the optical properties of the annealed poly-SiGe thin films. The stoichiometric evolution of the pristine thin film and its subsequent effect on the band gap upon annealing are discussed on the basis of diffusion characteristics of Si in poly-SiGe.
机构:
Natl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, MalaysiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Shahahmadi, S. A.
Zulkefle, A. Aizan
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Natl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, MalaysiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Zulkefle, A. Aizan
Hasan, A. K. M.
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Natl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, MalaysiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Hasan, A. K. M.
Rana, S. M.
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King Saud Univ, Coll Engn, Dept Elect Engn, Riyadh 11421, Saudi ArabiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Rana, S. M.
Bais, B.
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Natl Univ Malaysia, Fac Engn & Built Environm, Dept Elect Elect & Syst Engn, Bangi 43600, Selangor, MalaysiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Bais, B.
Akhtaruzzaman, M.
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Natl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, MalaysiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Akhtaruzzaman, M.
Alamoud, A. R. M.
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King Saud Univ, Coll Engn, Dept Elect Engn, Riyadh 11421, Saudi ArabiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Alamoud, A. R. M.
Amin, N.
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Natl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
Natl Univ Malaysia, Fac Engn & Built Environm, Dept Elect Elect & Syst Engn, Bangi 43600, Selangor, Malaysia
King Saud Univ, Coll Engn, Dept Elect Engn, Riyadh 11421, Saudi ArabiaNatl Univ Malaysia, Solar Energy Res Inst, Bangi 43600, Selangor, Malaysia
机构:
Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Tao, Dingbo
Li, Shufeng
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Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Xian Key Lab Adv Powder Met Mat & New Technol, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Li, Shufeng
Zhou, Shengyin
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Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Xian Key Lab Adv Powder Met Mat & New Technol, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Zhou, Shengyin
Liu, Huiying
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Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Liu, Huiying
Li, Xin
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Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Li, Xin
Li, Shaolong
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Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Li, Shaolong
Zhang, Xin
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Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Xian Key Lab Adv Powder Met Mat & New Technol, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Zhang, Xin
Li, Bo
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Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Xian Key Lab Adv Powder Met Mat & New Technol, Xian 710048, Peoples R ChinaXian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
机构:
Beijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R ChinaBeijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R China
Zhang, Guodong
Li, Neng
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Beijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R ChinaBeijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R China
Li, Neng
Gao, Jianshi
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Beijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R ChinaBeijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R China
Gao, Jianshi
Xiong, Huaping
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Beijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R ChinaBeijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R China
Xiong, Huaping
Yu, Huai
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Beijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R ChinaBeijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R China
Yu, Huai
Yuan, Hong
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Beijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R ChinaBeijing Inst Aeronaut Mat, 3D Printing Res & Engn Technol Ctr, Beijing 100095, Peoples R China