Study of optical and electrical properties of ZnO/Cu/ZnO multilayers deposited on flexible substrate

被引：20

作者：

Ionescu, Mihnea Ioan ^{[1
]}

Bensebaa, Farid ^{[2
]}

Luan, Ben Li ^{[1
]}

机构：

[1] Natl Res Council Canada, Inst Ind Mat, London, ON N6G 4X8, Canada

[2] Natl Res Council Canada, Inst Chem Proc & Environm Technol, Ottawa, ON K1A 0R6, Canada

来源：

THIN SOLID FILMS | 2012年 / 525卷

关键词：

Transparent conducting oxide; Multilayer; Zinc oxide; Copper; Flexible substrate; Sputtering; CONDUCTING OXIDE-FILMS; INDIUM-TIN-OXIDE; SOLAR-CELLS; THIN-FILMS; TRANSPARENT ELECTRODES; DEPENDENCE; THICKNESS; COATINGS; TEMPERATURE; DISPLAYS;

D O I：

10.1016/j.tsf.2012.10.064

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent conducting oxide thin films have been extensively studied because they are essential elements in optoelectronic applications. In this communication, we report transparent conductive ZnO/Cu/ZnO multilayer films prepared by RF sputtering of ZnO and DC sputtering of Cu on flexible polyethylene naphthalate substrates. The optical and electrical properties of the multilayers were studied for different thicknesses of Cu and ZnO layers. Controlling the thickness of the ZnO layer for a specific Cu thickness affects the transmittance of the multilayer. Electrical properties are influenced by the thickness of ZnO and Cu layers. Sheet resistance of the stack rises with the decrease of Cu thickness and the increase of ZnO thickness. Repeated bending of the stack, after an initial 20% increase of sheet resistance, has no significant effect on the electrical performance of the multilayers. (C) 2012 Published by Elsevier B.V.

引用

页码：162 / 166

页数：5

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