Field emission from nanometer-scale tips of crystalline PbZrxTi1-xO3

被引:10
作者
Fletcher, Patrick C. [1 ]
Mangalam, Vengadesh Kumara R. [2 ,3 ]
Martin, Lane W. [2 ,3 ]
King, William P. [1 ,2 ,3 ]
机构
[1] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[3] Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2013年 / 31卷 / 02期
关键词
ELECTRON-EMISSION; SILICON TIPS; CARBON NANOTUBES; THIN-FILMS; NANOPARTICLES;
D O I
10.1116/1.4793219
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors report field emission from nanometer-sharp tips of polarized PbZrxTi1- xO3 (PZT), silicon, and platinum. The PZT nanoemitters are fabricated in a batch fabrication process from single-crystal silicon tips that are coated with a 30 nm thick film of crystalline PZT. The nanoemitters start to emit electrons at fields as low as 2V/mu m and reach threshold emission, or turn-on, at fields as low as 3.9 V/mu m. The turn-on field is 3.9 V/mu m for PbZr0.2Ti0.8O3, 6.8 V/mu m for PbZr0.52Ti0.48O3, and 10.75 V/mu m for PbZr0.8Ti0.2O3. The silicon nanoemitters have an electron emission turn-on field of 7.2 V/mu m, and the platinum nanoemitters have an electron emission turn-on field of 5.75 V/mu m. Using a Fowler-Nordheim analysis, the calculated effective work function of the PbZr0.2Ti0.8O3 film is 1.00 eV, and the field amplification factor is similar to 1526. (C) 2013 American Vacuum Society. [http://dx.doi.org/10.1116/1.4793219]
引用
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页数:6
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