THE PROPERTIES OF TITANIUM OXIDE THIN FILMS FORMED USING E-BEAM DEPOSITION TECHNIQUE

被引：0

作者：

Bockute, Kristina ^{[1
]}

Laukaitis, Giedrius ^{[1
]}

Virbukas, Darius ^{[1
]}

Milcius, Darius ^{[1
]}

机构：

[1] Kaunas Univ Technol, Dept Phys, LT-51368 Kaunas, Lithuania

来源：

RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2012 | 2012年

关键词：

titanium dioxide; electron beam deposition; proton conductivity; MEMBRANE FUEL-CELLS; NANOTUBES;

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

This paper reports on an investigation of the morphological and electrical properties of TiO2 materials fabricated by e-beam deposition technique. It was found that substrate temperature has influence on films stability. Film becomes not stable at low substrate temperature due to high residual stresses. The conductivity measurements at different conditions show that TiO2 can be good electrolyte material for solid oxide proton conducting fuel cells.

引用

页码：131 / 134

页数：4

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