Surface potentials of patterned organosilane self-assembled monolayers acquired by Kelvin probe force microscopy and ab initio molecular calculation

被引:26
|
作者
Saito, N
Hayashi, K
Sugimura, H
Takai, O
Nakagiri, N
机构
[1] Nagoya Univ, Grad Sch Engn, Dept Mat Engn, Nagoya, Aichi 4648603, Japan
[2] Nikon Co, Core Technol Ctr, Tokyo 1408601, Japan
基金
日本学术振兴会;
关键词
D O I
10.1016/S0009-2614(01)01097-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This study aimed experimentally and theoretically to reveal the surface potentials of organosilane self-assembled monolayers (SAMs) using Kelvin probe force microscopy (KPFM) and ab initio molecular orbital (MO) calculations, and to distinguish among the surface domains of the SAMs. We prepared the patterned SAMs of n-octadecyltrimethoxysilane [ODS: H3C(CH2)(17)Si(OCH3)(3)], heptadecafluoro-1,1,2,2-tetrahydro-decyl-1-trimethoxysilane [FAS: F3C(CF2)(7)(CH2)(2) Si(OCH3)(3)] and n-(6-aminohexyl)aminopropyltrimethoxysilane [AHAPS: H2N(CH2)(6)NH(CH2), Si(OCH3)(3)] by chemical vapor deposition (CVD). The surface potentials for FAS-SAM and AHAPS-SAM vs. ODS-SAM in the atmosphere were -170 and +50 mV, respectively. The experimental surface potentials agreed with the calculated ones at the surface area occupied by a molecule of 1.1-1.5 nm(2) molecule(-1). (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:172 / 177
页数:6
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