Latest pixel size reduction of uncooled IR-FPA at CEA, LETI

被引：10

作者：

Becker, Sebastien ^{[1
]}

Imperinetti, Pierre ^{[1
]}

Yon, Jean-Jacques ^{[1
]}

Ouvrier-Buffet, Jean-Louis ^{[1
]}

Goudon, Valerie ^{[1
]}

Hamelin, Antoine ^{[1
]}

Vialle, Claire ^{[1
]}

Arnaud, Agnes ^{[1
]}

机构：

[1] MINATEC, LETI, CEA, F-38054 Grenoble, France

来源：

ELECTRO-OPTICAL AND INFRARED SYSTEMS: TECHNOLOGY AND APPLICATIONS IX | 2012年 / 8541卷

关键词：

Uncooled IR detector; Microbolometer; 12 mu m;

D O I：

10.1117/12.974579

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recent developments at the Infrared Lab (LIR) of CEA, LETI have been concentrated on the pixel size reduction of uncooled infrared detectors. With the support from French company ULIS, we have successfully demonstrated the technological integration of 12 mu m pixels on a commercial TV-format read-out circuit (VGA-ROIC) supplied by ULIS. The 12 mu m pixel has been designed, processed and characterized in CEA, LETI and first results showed exceptional performances. This paper presents the characterization and associated imagery results.

引用

页数：7

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