An ink-jet head using diaphragm microactuator

被引：16
|
作者：
Hirata, S [1 ]
Ishii, Y [1 ]
Matoba, H [1 ]
Inui, T [1 ]
机构：
[1] SHARP CO LTD,PRECIS TECHNOL DEV CTR,TENRI,NARA 632,JAPAN
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.494018
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：418 / 423
页数：6
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