Issues in HgCdTe Research and Expected Progress in Infrared Detector Fabrication

被引：50

作者：

Gravrand, O. ^{[1
]}

Destefanis, G. ^{[1
]}

Bisotto, S. ^{[1
]}

Baier, N. ^{[1
]}

Rothman, J. ^{[1
]}

Mollard, L. ^{[1
]}

Brellier, D. ^{[1
]}

Rubaldo, L. ^{[2
]}

Kerlain, A. ^{[2
]}

Destefanis, V. ^{[2
]}

Vuillermet, M. ^{[2
]}

机构：

[1] CEA LETI Minatec, Grenoble, France

[2] Sofradir, Veurey Voroize, France

来源：

JOURNAL OF ELECTRONIC MATERIALS | 2013年 / 42卷 / 11期

关键词：

HgCdTe; CdZnTe; HOT; SWAP; 10 mu m pitch; APD; dual band; AVALANCHE PHOTODIODES; TECHNOLOGY; ARRAYS;

D O I：

10.1007/s11664-013-2803-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The purpose of this paper is to review the trends in HgCdTe research, illustrating the discussed ideas with the latest results obtained at DEFIR (CEA-LETI and Sofradir joint laboratory). The beginning of this paper is devoted to an extended introduction to today's issues concerning HgCdTe photodiode performance enhancement. In fact, very high-quality material is mandatory for ultrahigh performance at low temperature as well as for high noise operability at high operating temperature (HOT). Therefore, a strong effort has been carried out during the last few years for lattice-matched CdZnTe substrate and HgCdTe active layer growth improvement, leading to very large substrates and ultraflat liquid-phase epitaxy layers. The same analysis holds for diode process quality and passivation. Therefore, the photodiode process has been completely revisited in order to optimize HOT operability. Also necessary for the next generation of HOT devices, some significant progress has been made in small-pixel-pitch interconnection on silicon read-out circuits. Indeed, the first 10-mu m focal-plane arrays (FPAs) have been successfully fabricated this year in the mid-wave infrared (IR) band. The latest avalanche photodiode (APD) realizations are also presented with 15-mu m-pitch FPAs for passive imaging and 30-mu m-pitch ultrafast arrays running at 1.5 kHz full frame rate. Linear-mode photon counting using APDs is also briefly discussed. Finally, the paper concludes on more complex structures for the third generation of IR detectors, discussing the latest achievements in dual-band FPA fabrication in various spectral bands.

引用

页码：3349 / 3358

页数：10

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