Reconstruction of an AFM image based on estimation of the tip shape

被引:8
|
作者
Yuan, Shuai [1 ,2 ,3 ]
Luan, Fangjun [1 ]
Song, Xiaoyu [1 ]
Liu, Lianqing [2 ]
Liu, Jifei [1 ]
机构
[1] Shenyang Jianzhu Univ, Informat & Control Engn Fac, Shenyang 110168, Peoples R China
[2] Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
[3] Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China
基金
中国国家自然科学基金;
关键词
AFM; tip model; blind tip estimation algorithm; image reconstruction; GEOMETRY;
D O I
10.1088/0957-0233/24/10/105404
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
From the viewpoint of mathematical morphology, an atomic force microscopy (AFM) image contains the distortion effect of the tip convolution on a real sample surface. If tip shape can be characterized accurately, mathematical deconvolution can be applied to reduce the distortion to obtain more precise AFM images. AFM image reconstruction has practical significance in nanoscale observation and manipulation technology. Among recent tip modeling algorithms, the blind tip evaluation algorithm based on mathematical morphology is widely used. However, it takes considerable computing time, and the noise threshold is hard to optimize. To tackle these problems, a new blind modeling method is proposed in this paper to accelerate the computation of the algorithm and realize the optimum threshold estimation to build a precise tip model. The simulation verifies the efficiency of the new algorithm by comparing the computing time with the original one. The calculated tip shape is also validated by comparison with the SEM image of the tip. Finally, the reconstruction of a carbon nanotube image based on the precise tip model illustrates the feasibility and validity of the proposed algorithm.
引用
收藏
页数:9
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