Mechanical and corrosive characteristics of Ta/TaN multilayer coatings

被引:44
作者
Ma, Guojia [1 ,2 ]
Lin, Guoqiang [2 ]
Gong, Shuili [1 ]
Liu, Xing [2 ]
Sun, Gang [1 ]
Wu, Hongchen [1 ]
机构
[1] Beijing Aeronaut Mfg Technol Res Inst, Natl Key Lab Sci & Technol Power Beam Proc, Beijing 100024, Peoples R China
[2] Dalian Univ Technol, Dept Phys & Optoelect Technol, Dalian 116024, Peoples R China
关键词
Multilayers; Ta/TaN; Mechanical properties; Corrosive properties; Ion bombardment; STABILITY; FILM;
D O I
10.1016/j.vacuum.2012.05.024
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ta/TaN multilayer coatings were prepared on Cr12MoV substrates by reactive magnetron sputtering combined with ion implantation. To achieve some information on the thickness and the interface of the coating, the cross-sections of the samples were observed by scanning electronic microscopy (SEM). The mechanical properties were evaluated using micro-indenter, micro-scratch and frictional wear testers and the corrosive behaviour was studied in aerated 3.5 wt.% NaCl aqueous solutions using an electrochemical work station. The mechanical and corrosive properties of the Ta/TaN multilayer coating were compared with TaN monolayer coating. The results showed that the Ta/TaN multilayer prepared by reactive magnetron sputtering combined with ion implantation exhibited high adhesion (about 50 N), excellent wear resistance and better corrosion resistance. The Ta/TaN multilayer was applied in a fuel pump accessory and the trial run test showed the service life of the part increased 5 times. It has been proved that ion implantation played an important role in enhancing adhesion and selection of appropriate modulation periods and layers improved the mechanical and corrosive properties. (C) 2012 Elsevier Ltd. All rights reserved.
引用
收藏
页码:244 / 248
页数:5
相关论文
共 10 条
[1]   Wear-resistant multilayered diamond-like carbon coating prepared by pulse biased arc ion plating [J].
Huang, RF ;
Chan, CY ;
Lee, CH ;
Gong, J ;
Lai, KH ;
Lee, CS ;
Li, KY ;
Wen, LS ;
Sun, C .
DIAMOND AND RELATED MATERIALS, 2001, 10 (9-10) :1850-1854
[2]   Growth structure and growth defects in pulsed laser deposited Cr-CrNx-CrCxN1-x multilayer coatings [J].
Lackner, JM ;
Waldhauser, W ;
Major, B ;
Morgiel, J ;
Major, L ;
Takahashi, H ;
Shibayama, T .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (11) :3644-3649
[3]   Structural, mechanical and tribological investigations of pulsed laser deposited titanium nitride coatings [J].
Lackner, JM ;
Waldhauser, W ;
Berghauser, R ;
Ebner, R ;
Major, B ;
Schöberl, T .
THIN SOLID FILMS, 2004, 453 :195-202
[4]   Structural and chemical stability of Ta-Si-N thin film between Si and Cu [J].
Lee, YJ ;
Suh, BS ;
Rha, SK ;
Park, CO .
THIN SOLID FILMS, 1998, 320 (01) :141-146
[5]   Nanoscale multilayer WC/C coatings developed for nanopositioning, part II: Friction and wear [J].
Liu, Y ;
Gubisch, M ;
Hild, W ;
Scherge, M ;
Spiess, L ;
Knedlik, C ;
Schaefer, JA .
THIN SOLID FILMS, 2005, 488 (1-2) :140-148
[6]  
Ma GJ, 2007, CHINESE PHYS, V16, P1105, DOI 10.1088/1009-1963/16/4/041
[7]   Nano-mechanical properties of BCN/CN/BN multilayer films [J].
Morant, C. ;
Caceres, D. ;
Sanz, J. M. ;
Elizalde, E. .
DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) :1441-1444
[8]   MULTILAYER COATING FOR CARBON-CARBON COMPOSITES [J].
MORIMOTO, T ;
OGURA, Y ;
KONDO, M ;
UEDA, T .
CARBON, 1995, 33 (04) :351-357
[9]   Epitaxial and polycrystalline HfNx (0.8≤x≤1.5) layers on MgO(001):: Film growth and physical properties -: art. no. 083521 [J].
Seo, HS ;
Lee, TY ;
Petrov, I ;
Greene, JE ;
Gall, D .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (08)
[10]   Superior thermal stability of Ta/TaN bi-layer structure for copper metallization [J].
Xie, Qi ;
Qu, Xin-Ping ;
Tan, Jing-Jing ;
Jiang, Yu-Long ;
Zhou, Mi ;
Chen, Tao ;
Ru, Guo-Ping .
APPLIED SURFACE SCIENCE, 2006, 253 (03) :1666-1672