Multilayers;
Ta/TaN;
Mechanical properties;
Corrosive properties;
Ion bombardment;
STABILITY;
FILM;
D O I:
10.1016/j.vacuum.2012.05.024
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Ta/TaN multilayer coatings were prepared on Cr12MoV substrates by reactive magnetron sputtering combined with ion implantation. To achieve some information on the thickness and the interface of the coating, the cross-sections of the samples were observed by scanning electronic microscopy (SEM). The mechanical properties were evaluated using micro-indenter, micro-scratch and frictional wear testers and the corrosive behaviour was studied in aerated 3.5 wt.% NaCl aqueous solutions using an electrochemical work station. The mechanical and corrosive properties of the Ta/TaN multilayer coating were compared with TaN monolayer coating. The results showed that the Ta/TaN multilayer prepared by reactive magnetron sputtering combined with ion implantation exhibited high adhesion (about 50 N), excellent wear resistance and better corrosion resistance. The Ta/TaN multilayer was applied in a fuel pump accessory and the trial run test showed the service life of the part increased 5 times. It has been proved that ion implantation played an important role in enhancing adhesion and selection of appropriate modulation periods and layers improved the mechanical and corrosive properties. (C) 2012 Elsevier Ltd. All rights reserved.
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Huang, RF
;
Chan, CY
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Chan, CY
;
Lee, CH
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Lee, CH
;
Gong, J
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h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Gong, J
;
Lai, KH
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h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Lai, KH
;
Lee, CS
论文数: 0引用数: 0
h-index: 0
机构:
City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R ChinaCity Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Lee, CS
;
Li, KY
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Li, KY
;
Wen, LS
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Wen, LS
;
Sun, C
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
机构:
Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South KoreaKorea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
Lee, YJ
;
Suh, BS
论文数: 0引用数: 0
h-index: 0
机构:Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
Suh, BS
;
Rha, SK
论文数: 0引用数: 0
h-index: 0
机构:Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
Rha, SK
;
Park, CO
论文数: 0引用数: 0
h-index: 0
机构:Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Huang, RF
;
Chan, CY
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Chan, CY
;
Lee, CH
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Lee, CH
;
Gong, J
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Gong, J
;
Lai, KH
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Lai, KH
;
Lee, CS
论文数: 0引用数: 0
h-index: 0
机构:
City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R ChinaCity Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Lee, CS
;
Li, KY
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Li, KY
;
Wen, LS
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
Wen, LS
;
Sun, C
论文数: 0引用数: 0
h-index: 0
机构:City Univ Hong Kong, Dept Phys & Mat Sci, Ctr Super Diamond & Adv Films, COSDAF, Hong Kong, Hong Kong, Peoples R China
机构:
Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South KoreaKorea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
Lee, YJ
;
Suh, BS
论文数: 0引用数: 0
h-index: 0
机构:Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
Suh, BS
;
Rha, SK
论文数: 0引用数: 0
h-index: 0
机构:Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
Rha, SK
;
Park, CO
论文数: 0引用数: 0
h-index: 0
机构:Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea