Rapid crystallization of sol-gel-deposited lead zirconate titanate thin films by 2.45 GHz microwave irradiation

被引：9
作者：
Wang, Zhan Jie [1 ,2 ]
Otsuka, Yuka [2 ]
Cao, Ziping [2 ]
Yoshikawa, Noboru [2 ]
Kokawa, Hiroyuki [2 ]
机构：
[1] Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Peoples R China
[2] Tohoku Univ, Grad Sch Engn, Dept Mat Sci & Engn, Sendai, Miyagi 9808579, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2008年 / 47卷 / 09期
关键词：
lead zirconate titanate (PZT); sol-gel; microwave irradiation; microstructure; electrical properties;
D O I：
10.1143/JJAP.47.7519
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Pb(Zr0.5Ti0.48)O-3 (PZT) thin films were coated onto Pt/Ti/SiO2/Si substrates by a sol-gel method and then crystallized by 2.45 GHz microwave irradiation in a magnetic field. The crystalline phases and microstructures as well as the electrical properties of the microwave-irradiated PZT films were investigated as a function of the elevated temperature generated by microwave irradiation. The perovskite PZT thin films with good electrical properties could be obtained by microwave irradiation at 650 C for 60 s. The average values of the remanent polarization and the coercive field of the PZT films were approximately 27 mu C/cm(2) and 95 kV/cm, respectively, whereas the dielectric constant and loss value measured at 1 kHz were approximately 1100 and 0.18. respectively. It is clear that microwave irradiation is effective for obtaining well-crystallized PZT films with good properties in a short process time.
引用
收藏
页码：7519 / 7522
页数：4
相关论文
共 22 条
  • [11] Ferroelectric thin films in microelectromechanical systems applications
    Polla, DL
    Francis, LF
    [J]. MRS BULLETIN, 1996, 21 (07) : 59 - 65
  • [12] Full sintering of powdered-metal bodies in a microwave field
    Roy, R
    Agarwal, D
    Chen, JP
    Gedevanishvili, S
    [J]. NATURE, 1999, 399 (6737) : 668 - 670
  • [13] Materials issues in microelectromechanical systems (MEMS)
    Spearing, SM
    [J]. ACTA MATERIALIA, 2000, 48 (01) : 179 - 196
  • [14] Rapid formation and growth of bixbyite-type (In0.67Fe0.33)2O3 by 28 GHz microwave irradiation
    Takizawa, H
    Uheda, K
    Endo, T
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2000, 83 (09) : 2321 - 2323
  • [15] Preparation and application of lead zirconate titanate (PZT) films deposited by hybrid process: Sol-gel method and laser ablation
    Tsaur, J
    Wang, ZJ
    Zhang, LL
    Ichiki, M
    Wan, JW
    Maeda, R
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (11B): : 6664 - 6668
  • [16] Low-temperature growth of ferroelectric lead zirconate titanate thin films using the magnetic field of low power 2.45 GHz microwave irradiation
    Wang, Z. J.
    Cao, Z. P.
    Otsuka, Y.
    Yoshikawa, N.
    Kokawa, H.
    Taniguchi, S.
    [J]. APPLIED PHYSICS LETTERS, 2008, 92 (22)
  • [17] Low-temperature growth of high-quality lead zirconate titanate thin films by 28 GHz microwave irradiation
    Wang, ZJ
    Kokawa, H
    Takizawa, H
    Ichiki, M
    Maeda, R
    [J]. APPLIED PHYSICS LETTERS, 2005, 86 (21) : 1 - 3
  • [18] Effect of bottom electrodes on microstructures and electrical properties of sol-gel derived Pb(Zr0.53Ti0.47)O3 thin films
    Wang, ZJ
    Chu, JR
    Maeda, R
    Kokawa, H
    [J]. THIN SOLID FILMS, 2002, 416 (1-2) : 66 - 71
  • [19] Microstructure and electrical properties of lead zirconate titanate thin films deposited by excimer laser ablation
    Wang, ZJ
    Maeda, R
    Ichiki, M
    Kokawa, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (9B): : 5523 - 5527
  • [20] Effect of Pb content in target on electrical properties of laser ablation derived lead zirconate titanate thin films
    Wang, ZJ
    Kikuchi, K
    Maeda, R
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (9B): : 5413 - 5417
123