Highly electroconductive TiN/Si3N4 composite ceramics fabricated by spark plasma sintering of Si3N4 particles with a nano-sized TiN coating

被引:33
作者
Kawano, S [1 ]
Takahashi, J [1 ]
Shimada, S [1 ]
机构
[1] Hokkaido Univ, Grad Sch Engn, Sapporo, Hokkaido 0608628, Japan
关键词
D O I
10.1039/b107058b
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Si3N4 particles coated with 20 nm TiN have been sintered by spark plasma sintering (SPS) at 1600degreesC. The 25 vol.% TiN ceramic achieved a relative density of 91% without sintering additives. TEM and HREM observations indicate that a glassy phase derived from the Si3N4 particles plays a role in densification. Ceramics derived from TiN/Si3N4 composite particles containing 25 and 32.5 vol.% TiN possess continuous TiN networks in a Si3N4 matrix and their electrical resistivity is of the order of 1 x 10(-4) Ohm cm, much lower than that of a mechanical mixture of nano-sized TiN particles and Si3N4 particles (1 Ohm cm).
引用
收藏
页码:361 / 365
页数:5
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