Structural, Electrical, and Optical Properties of Na-Doped ZnO Thin Films Deposited by Pulsed Laser Deposition

被引:11
作者
Shan, F. K. [1 ,2 ,3 ]
Liu, G. X. [1 ,2 ,3 ]
Lee, W. J. [1 ]
Bae, K. R. [1 ]
Shin, B. C. [1 ]
Kim, H. S. [4 ]
机构
[1] Dong Eui Univ, Elect Ceram Ctr, Pusan 614714, South Korea
[2] QingDao Univ, Growing Base State Key Lab, Coll Phys Sci, Qingdao 266071, Peoples R China
[3] QingDao Univ, Lab New Fiber Mat & Modern Text, Growing Base State Key Lab, Qingdao 266071, Peoples R China
[4] Korea Maritime Univ, Dept Semicond Phys, Pusan 600545, South Korea
关键词
Na-Doped ZnO; Thin Film; Structure; Optical Property; PL;
D O I
10.1166/jnn.2008.1192
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Na-doped ZnO thin films were deposited on quartz substrates at various temperatures by using pulsed laser deposition technique. An X-ray diffractometer and an atomic force microscope were used to investigate the structural and morphological properties of the thin films. A Hall effect measurement system was used to investigate the electrical properties of the thin films. A spectrophotometer was used to measure the transmittances of the thin films. The band gap energies of the thin films were calculated by linear fitting the sharp absorption edge for high-quality thin film. The band gap energies of the Na-doped ZnO thin films are nearly the same as the pure ZnO. A spectrometer was used to investigate the luminescent properties of the thin films. The thin film deposited at 200 degrees C had no near band edge emission and no deep-level emission. The NBE emission appeared and increased with increasing the growth temperature.
引用
收藏
页码:5203 / 5207
页数:5
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