Note: Thickness determination of freestanding ultra-thin foils using a table top laboratory extreme ultraviolet source

被引：7

作者：

Braenzel, J. ^{[1
]}

Pratsch, C. ^{[1
,2
]}

Hilz, P. ^{[3
]}

Kreuzer, C. ^{[3
]}

Schnuerer, M. ^{[1
]}

Stiel, H. ^{[1
,4
]}

Sandner, W. ^{[1
]}

机构：

[1] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12489 Berlin, Germany

[2] Helmholtz Zentrum MZB, D-12489 Berlin, Germany

[3] Univ Munich, D-85748 Garching, Germany

[4] Berlin Lab Innovat Xray Technol BLiX, D-10623 Berlin, Germany

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2013年 / 84卷 / 05期

关键词：

DYNAMICS; FILMS;

D O I：

10.1063/1.4807153

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present a versatile and handy method allowing a thickness determination of freestanding thin plastic foils by its transmission characteristics in the extreme ultraviolet (EUV) spectrum. The method is based on a laser induced plasma source, emitting light in the EUV region, a compact double-mirror EUV monochromator operating at a fixed wavelength of 18.9 nm, and a CCD camera. The measurement delivers transmission values with a standard deviation of Delta T = 0.005 enabling foils thickness characterization with nm-accuracy at a given foil density and stoichiometric composition. Well characterized freestanding ultra-thin foils can be directly implemented in, e. g., high intensity laser matter experiments without further manipulation. (C) 2013 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4807153]

引用

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