Nanoscale modification of optical properties in Ge-doped SiO2 glass by electron-beam irradiation

被引:36
|
作者
Jiang, N
Qiu, JR
Gaeta, AL
Silcox, J
机构
[1] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA
[2] Cornell Univ, Cornell Ctr Mat Res, Ithaca, NY 14853 USA
关键词
D O I
10.1063/1.1454211
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this letter, we demonstrate rapid decomposition in Ge-doped SiO2 glass under high-energy electron irradiation, and comment on possible mechanisms for the interaction of the electron-beam with the glass. Nanometer-scale modifications in Ge-doped SiO2 glasses can be obtained by the redistribution of Ge in the glasses as a result of patterned electron-beam writing. (C) 2002 American Institute of Physics.
引用
收藏
页码:2005 / 2007
页数:3
相关论文
共 50 条
  • [21] Decay behavior of UV-induced defects in Ge-doped SiO2 glass
    Ohama, M
    Fujiwara, T
    Ikushima, AJ
    24TH EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION, VOL 1-3: VOL 1: REGULAR AND INVITED PAPERS; VOL 2: TUTORIALS AND SYMPOSIUM PAPERS; VOL 3: POSTDEADLINE PAPERS, 1998, : 141 - 142
  • [22] Energy states of Ge-doped SiO2 glass estimated through absorption and photoluminescence
    Fujimaki, M
    Ohki, Y
    Nishikawa, H
    JOURNAL OF APPLIED PHYSICS, 1997, 81 (03) : 1042 - 1046
  • [23] Optical properties and photosensitivity of vacuum synthesized Ge-doped sol-gel amorphous SiO2
    Agnello, S
    Boscaino, R
    La Mattina, F
    Grandi, S
    Magistris, A
    PROCEEDINGS OF WFOPC 2005: 4TH IEEE/LEOS WORKSHOP ON FIBRES AND OPTICAL PASSIVE COMPONENTS, 2005, : 422 - 426
  • [24] ELECTRON-BEAM PATTERNING OF SIO2
    ALLEN, PE
    GRIFFIS, DP
    RADZIMSKI, ZJ
    RUSSELL, PE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1992, 10 (04): : 965 - 969
  • [25] DIRECT NANOMETER SCALE PATTERNING OF SIO2 WITH ELECTRON-BEAM IRRADIATION
    ALLEE, DR
    UMBACH, CP
    BROERS, AN
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 2838 - 2841
  • [26] ELECTRON-IRRADIATION EFFECT ON PROPERTIES OF GE-DOPED GAAS
    BRUDNYI, VN
    BUDNITSKII, DL
    KOLIN, NG
    MALISOVA, YV
    NIKIFOROVA, MP
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1991, 34 (04): : 82 - 86
  • [27] Thermal annealing in FHD Ge-doped SiO2 film for applications in optical waveguides
    Zhang, LT
    Xie, WF
    Wang, J
    Li, AW
    Xing, H
    Zheng, W
    Zhang, YS
    APPLIED SURFACE SCIENCE, 2004, 228 (1-4) : 48 - 52
  • [28] Effect of annealing on Ge-doped SiO2 thin films
    Fujimaki, M
    Shimoto, S
    Miyazaki, N
    Ohki, Y
    Seol, KS
    Imamura, K
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (09) : 5270 - 5273
  • [29] Structural, chemical and optical characterisation of Ge-doped SiO2 glass films grown by magnetron rf-sputtering
    Departamento de Física, Univ. Do Minho, Largo Do Paco, 4709, Braga Codex, Portugal
    不详
    J Mater Process Technol, (269-273):
  • [30] Structural, chemical and optical characterisation of Ge-doped SiO2 glass films grown by magnetron rf-sputtering
    Rolo, AG
    Conde, O
    Gomes, MJM
    dos Santos, MP
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 1999, 93 : 269 - 273