An autonomous impact resonator with metal beam between a pair of parallel-plate electrodes

被引:23
|
作者
Yan, Xiaojun [1 ]
Qi, Mingjing [1 ]
Lin, Liwei [2 ]
机构
[1] Beijing Univ, Sch Energy & Power Engn, Beijing 100191, Peoples R China
[2] Univ Calif Berkeley, Dept Mech Engn, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
基金
中国国家自然科学基金;
关键词
Autonomous impact resonator; Electrical breakthrough; Frequency output; Motion trajectory; ELECTROSTATIC ACTUATORS; TRAVEL; RANGE; OSCILLATOR; DEVICES; DESIGN; SENSOR; MODEL;
D O I
10.1016/j.sna.2013.06.012
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports an autonomous impact resonator with a metal beam fixed on an insulated base between a pair of parallel-plate electrodes. The beam can be excited to impact the positive and negative electrodes alternately and maintain oscillation only by DC input. Compared with previous autonomous impact resonators, this resonator can achieve stable frequency output without causing harmful electrical breakthrough of the circuit. Besides that, the motion trajectory of the beam can be tunable by adjusting the electrodes placement. As such, the resonator is very attractive for future micro sensors and actuators applications, especially for actuators of micro flapping robots. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:366 / 371
页数:6
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