The thermal interaction mechanism between C4F7N (fluorinated nitrile)-N-2 gas mixture using as substitute to SF6 with metal was investigated. We found that interaction between C4F7N-N-2 and copper leads to surface corrosion or gas decomposition with interface temperature at 120 degrees C-220 degrees C. The oxidation of copper and accumulation of F, CFx and CN can be found and gaseous by-products such as C3F6, CF3H, C3F6O is produced. C4F7N-N-2 has better compatibility with aluminum than that of copper due to the existence of alumina. The interaction between C4F7N and alumina surface has the lowest adsorption energy, charge transfer compared with that of copper and aluminum.
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PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Aperam Isbergues, Res Ctr, Solut Dept, Rue Roger Salengro, F-62330 Isbergues, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Gardin, Elise
Zanna, Sandrine
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PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Zanna, Sandrine
Seyeux, Antoine
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PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Seyeux, Antoine
Allion-Maurer, Audrey
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Aperam Isbergues, Res Ctr, Solut Dept, Rue Roger Salengro, F-62330 Isbergues, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Allion-Maurer, Audrey
Marcus, Philippe
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PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
机构:
PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Aperam Isbergues, Res Ctr, Solut Dept, Rue Roger Salengro, F-62330 Isbergues, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Gardin, Elise
Zanna, Sandrine
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h-index: 0
机构:
PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Zanna, Sandrine
Seyeux, Antoine
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h-index: 0
机构:
PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Seyeux, Antoine
Allion-Maurer, Audrey
论文数: 0引用数: 0
h-index: 0
机构:
Aperam Isbergues, Res Ctr, Solut Dept, Rue Roger Salengro, F-62330 Isbergues, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France
Allion-Maurer, Audrey
Marcus, Philippe
论文数: 0引用数: 0
h-index: 0
机构:
PSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, FrancePSL Res Univ, CNRS, Chim ParisTech, IRCP,Phys Chem Surfaces Grp, 11 Rue Pierre & Marie Curie, F-75005 Paris, France